Metrology with Synchrotron Radiation

Table 2 Beamlines used by PTB at the Metrology Light Source and at BESSY II

Beamline		Source	Monochromator	Spectral range	Resolving power	Photon flux/s⁻¹
MLS				Wavelength
M1a	VUV irradiation	U125	Reflection filter	≥ 40 nm	Broadband	10¹³
M1b	Direct undulator radiation	U125
M1c	IDB^a	U125	NI-GI plane grating	4 to 400 nm	10³	10¹²
M1d	IR undulator radiation	U125
M1e	90° undulator radiation	U125		500 to 1500 nm	Broadband
M2a	White-light beamline	Dipole
M2b	Source calibration^b	Dipole	Seya/toroidal	7 to 400 nm
M3	EUVR^c	Dipole	Plane grating	5 to 50 nm	10³	10¹²
M4	NIM detector calibration^d	Dipole	Normal incidence	40 to 400 nm	10²	10¹⁰ to 10¹²
M5	THz^e	Dipole	FTIR	100 μm to 7 mm	10¹ to 10³
M6	IR^e	Dipole	FTIR	600 nm to 1000 μm	10² to 10⁴	Up to 10¹⁷
BESSY II				Photon energy
B1	SX700^f	Dipole	Plane grating	50 to 1900 eV	10³ to 10⁴	10¹¹
B2a	FCM^g	Dipole	Four crystal	1750 eV to 11 keV	10⁴	10¹¹
B2b	XPBF 1.0^h	Dipole	DCM/DMM	1.0; 2.8 keV	10² to 10⁴	10⁶ to 10⁸
B3a	White-light beamline	Dipole
B3b	Source calibrationⁱ	Dipole	Normal incidence	3 to 30 eV
B3c	EUV irradiation	Dipole	Transmission filter	> 5 nm, broadband		Up to 10¹⁷
B4a	Direct undulator radiation	U49
B4b	PGM^j	U49	Plane grating	40 to 1860 eV	10³ to 10⁴	10⁸ to 10¹³
B4c	ID13	U49	Elliptical focussing	73 to 124 eV	50	Up to 10¹⁷
B5	BAMline^k	WLS	DCM/DMM	8 to 60 keV	10³	10⁷
B6	XPBF 2.0^l	Dipole	Multilayer	1600 eV	10²	10¹²

^a(Gottwald et al. 2019a,^bThornagel et al. 2015, ^cLaubis et al. 2013, ^dGottwald et al. 2010, ^eMüller et al. 2012b, ^fScholze et al. 2001, ^gKrumrey and Ulm 2001, ^hKrumrey et al. 2010, ⁱRichter et al. 2001, ^jSenf et al. 1998, ^kGörner et al. 2001, ^lKrumrey et al. 2016)