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Laser-Induced Periodic Surface Structures (LIPSS)

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Handbook of Laser Micro- and Nano-Engineering

Abstract

Laser-induced periodic surface structures (LIPSS) are a universal phenomenon and can be generated on almost any material by irradiation with linearly polarized radiation. This chapter reviews the current state in the field of LIPSS, which are formed in a “self-ordered” way and are often accompanying materials processing applications. LIPSS can be produced in a single-stage process and enable surface nanostructuring and, in turn, adaption of optical, mechanical, and chemical surface properties. Typically, they feature a structural size ranging from several micrometers down to less than 100 nm and show a clear correlation with the polarization direction of the light used for their generation. Various types of LIPSS are classified, relevant control parameters are identified, and their material-specific formation mechanisms are analyzed for different types of inorganic solids, i.e., metals, semiconductors, and dielectrics. Finally, technological applications featuring surface functionalization in the fields of optics, fluidics, medicine, and tribology are discussed.

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Correspondence to Jörn Bonse .

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Glossary

A

Absorbed energy at the surface

α

Linear absorption coefficient

b

Fourier spectrum of surface roughness

D

Gaussian beam diameter

d

Depth

δ SPP

SPP penetration depth

δθ

Opening angle

Δt

Delay time

E

Laser pulse energy

\( \overrightarrow{E} \)

Electric field vector/laser polarization

E g

Band gap energy

ε, ε

Dielectric permittivity (∗: Excited material)

f

Pulse repetition frequency

F

Filling factor

ϕ, ϕ0, ϕth

Fluence, peak fluence, threshold fluence

h

Film thickness

κ

Normalized wave vector component

L SPP

SPP propagation length

λ

Wavelength

Λ

Period

N

Number of pulses per irradiated spot

N e

Electron density

N eff_1D

Effective number of pulses per beam spot diameter

n, n0, nM

Refractive index (real part)

η

Efficacy factor

r

Radial coordinate

R

Reflectivity

s

Shape factor

T

Temperature

t

Time

τ

Pulse duration

θ

Angle of incidence

v

Scan velocity

w 0

Gaussian beam radius

BT

Benzenethiol

CB

Conduction band

CFRP

Carbon fiber-reinforced plastics

COF

Coefficient of friction

CW

Cylindrical wave

DESY

German Electron synchrotron

FDTD

Finite-difference time-domain

FT

Fourier transform

HSFL

High-spatial-frequency LIPSS

IR

Infrared

LIPSS

Laser-induced periodic surface structures

LSFL

Low-spatial-frequency LIPSS

MD

Molecular dynamics

NIR

Near-infrared

NP

Nanoparticle

PC

Polycarbonate

PET

Poly(ethylene terephthalate)

PI

Polyimide

PLLA

Poly-L-lactic acid

PMMA

Poly(methyl methacrylate)

PS

Polystyrene

PTT

Poly(trimethylene terephthalate)

RR

Radiation remnant

RSTT

Reciprocating sliding tribological test

RT

Room temperature

SEM

Scanning electron microscopy

SERS

Surface-enhanced Raman scattering

SEW

Surface electromagnetic wave

SiC

Silicon carbide

SPP

Surface plasmon polariton

UV

Ultraviolet

VB

Valence band

XUV

Extreme ultraviolet

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Bonse, J., Kirner, S.V., Krüger, J. (2021). Laser-Induced Periodic Surface Structures (LIPSS). In: Sugioka, K. (eds) Handbook of Laser Micro- and Nano-Engineering. Springer, Cham. https://doi.org/10.1007/978-3-030-63647-0_17

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