Abstract
Porous silicon (PSi) is an excellent nanoscale material for construction of biochips-based sensors. In this chapter, we first introduce basic concepts, as well as the morphological and optical properties of porous silicon material. Then, different structures of porous silicon photonic devices are described, including single-layer interferometer, Bragg reflector, multilayer resonant microcavity, double layer waveguide, localized surface plasmon resonance (LSPR), and surface enhanced Raman spectroscopy (SERS) biosensors. These devices are designed to achieve high sensitivity for biosensing applications. Next, two approaches for the biofunctionalization of porous silicon to optimize specificity in biosensing are discussed. These two approaches are designed for two different mechanisms of biosensing. To demonstrate biosensor application of porous silicon-based photonic devices, several examples are then given to showcase their principle-of-operation, their application in the detection of a specific biotarget, and their limit of detection. These biosensor examples include all the photonic device structures discussed in a previous section. Following biosensor examples discussions include the effect of biomolecular size on sensitivity of porous silicon biosensor. This is to showcase the importance of size consideration in biosensor design. Afterward, we present the concepts of wafer level fabrication of porous silicon and the formation of biochips from porous silicon chips, as well as biochip signal interrogation in a high-throughput way. The conclusion is drawn at last with projection about future development of porous silicon biosensors and biochips.
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Rong, G., Bian, S., Sawan, M. (2022). Porous Silicon-Based Biosensors. In: Sawan, M. (eds) Handbook of Biochips. Springer, New York, NY. https://doi.org/10.1007/978-1-4614-3447-4_65
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DOI: https://doi.org/10.1007/978-1-4614-3447-4_65
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