Abstract
This chapter discusses mechanical design techniques and control approaches that can be used to achieve high speed and fine precision control of micro- and nanoscale positioning systems. By carefully using these design considerations, undesirable effects such as thermal drift, mechanical resonances, and off-axis motion can be minimized. Additionally, control systems can be designed to improve the positioning capabilities in open-loop and closed-loop configurations, allowing for high-bandwidth motion control while minimizing nonlinearities, such as hysteresis, and detrimental external disturbances.
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Nagel, W., Leang, K. (2019). Mechanical Design and Control for Speed and Precision. In: Baillieul, J., Samad, T. (eds) Encyclopedia of Systems and Control. Springer, London. https://doi.org/10.1007/978-1-4471-5102-9_100040-1
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DOI: https://doi.org/10.1007/978-1-4471-5102-9_100040-1
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