Introduction to Nanomanufacturing Using Ion Beam Technology

  • Fengzhou FangEmail author
Reference work entry


Nanomanufacturing utilizes value-added processes to control materials structures, components, devices, and systems at the nanoscale for reproducible, commercial-scale production. It is the essential bridge between the discoveries of nanoscience and real-world nanotechnology products. In recent years, ion beam technology has found wide applications in nano precision or nanoscale manufacturing. Ion beam nanomanufacturing (IBNM) technologies mainly consist of four approaches: ion-induced imaging, ion milling removal, ion-induced deposition, and ion implantation or modification, which are usually performed under a stream of accelerated ions by electrical means. Versatile materials can be processed by IBNM, such as diamond, metals, thin films, polymers, and semiconductors.


Nanometer Cutting Nanofabrication Technology Nanogap Electrode Super Smooth Surface Nanoscale Manufacturing 
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Copyright information

© Springer-Verlag London 2015

Authors and Affiliations

  1. 1.The State Key Laboratory of Precision Measuring Technology & Instruments, Centre of MicroNano Manufacturing TechnologyTianjin UniversityTianjinChina

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