Handbook of Manufacturing Engineering and Technology pp 1277-1278 | Cite as
Introduction to Nanomanufacturing Using Ion Beam Technology
Nanomanufacturing utilizes value-added processes to control materials structures, components, devices, and systems at the nanoscale for reproducible, commercial-scale production. It is the essential bridge between the discoveries of nanoscience and real-world nanotechnology products. In recent years, ion beam technology has found wide applications in nano precision or nanoscale manufacturing. Ion beam nanomanufacturing (IBNM) technologies mainly consist of four approaches: ion-induced imaging, ion milling removal, ion-induced deposition, and ion implantation or modification, which are usually performed under a stream of accelerated ions by electrical means. Versatile materials can be processed by IBNM, such as diamond, metals, thin films, polymers, and semiconductors.