State-of-the-Art for Nanomanufacturing Using Ion Beam Technology

  • Fengzhou FangEmail author
  • Zongwei Xu
Reference work entry


Ion-beam manufacturing is developing toward nanoaccuracy and nanoscale. In this regard, the concept and working principle of ion-beam manufacturing in nanoaccuracy and nanoscale are presented in this chapter. The key techniques for ion-beam manufacturing are discussed with an emphasis on their capabilities in the fabrication of micro-/nano-features. The corresponding typical applications involved in ion-beam manufacturing are provided. The recent developments in ion-beam-related instruments are given as well. Finally, the future trends for ion-beam manufacturing are predicted.


Surface Plasmon Polaritons Plasmonic Lens Removal Function Propagate Surface Plasmon Thin Film Substrate 
These keywords were added by machine and not by the authors. This process is experimental and the keywords may be updated as the learning algorithm improves.



The book’s publication is supported by the National Natural Science Foundation of China (No. 90923038, 51275559, 50935001), National Basic Research Program of China (973 Program, Grant No.2011CB706700), Ministry of Industry and Information Technology (No. 2011ZX04014-071), National High Technology Research and Development Program of China (863 Program, Grant No. 2012AA040405), and the “111” project by the State Administration of Foreign Experts Affairs and the Ministry of Education of China (Grant No. B07014).


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Copyright information

© Springer-Verlag London 2015

Authors and Affiliations

  1. 1.The State Key Laboratory of Precision Measuring Technology & Instruments, Centre of MicroNano Manufacturing TechnologyTianjin UniversityNankai DistrictChina
  2. 2.College of Precision Instrument and Opto-electronics Engineering, Centre of MicroNano Manufacturing TechnologyTianjin UniversityTianjinChina

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