Synonyms
MEMS actuators
Definition
Microactuators are small-scale active devices capable of generating mechanical motion of solids or fluids. Motion is generated via converting one form of energy (for instance electrical) into kinetic energy. Typical sizes of microactuators vary from a few millimetres to a few micrometers, but total sizes can reach centimetres when packaged. When generating mechanical motion of solids, typical displacements are in the nanometer to millimeter range, and typical forces generated are in the nanoNewton to miliNewton range. For microfluidic actuators, typical flow rates generated are in the picoLiter/minute to microLiter/minute ranges.
Overview
Microactuators operate by converting one form of energy (e. g. electrical, thermal, electromagnetic) into kinetic energy of movable components. They are sometimes referred to as Micro-Electro-Mechanical-Systems (MEMS) actuators, but the later term is more commonly used in the United States to denote...
Access this chapter
Tax calculation will be finalised at checkout
Purchases are for personal use only
References
Bellouard Y (2002), Microrobotics, Microdevices Based on Shape-Memory Alloys. In: Encyclopedia of Smart Materials. Wiley
Bruck R, Rizvi N, Schmidt A (2001) Applied Microtechnology: LIGA – Laser – Micro Precision Engineering. Hanser–Gardner
Butler JT, Bright VM, Cowan WD (1999) Average Power Control and Positioning of Thermal Actuators. Sens Actuators 99–97
Hah D, Toshiyoshi H, Wu MC (2002) Design of Electrostatic Actuators for MOEMS Applications, Design, Test, Integration and Packaging of MEMS/MOEMS. Proc SPIE 4755:200–207
Laser DJ, Santiago JG (2004) A review of micropumps, JÂ Micromech Microeng 14
Liu C, Yi YW (1999) Micromachined Magnetic Actuators Using Electroplated Permalloy. IEEE Trans Magn 35(3):1976–1985
Madou M (1998) Fundamentals of Microfabrication. CRC, Boca Raton
Piazza G, Pisano AP (2007) Two-port stacked piezoelectric aluminum nitride contour-mode resonant MEMS. Sens Actuators A 136:638–645
Popa DO, Stephanou H (2004) Micro and Meso Scale Robotic Assembly. SME J Manuf Proc 6(1):52–71
Senturia S (2000) Microsystem Design. Springer
Author information
Authors and Affiliations
Editor information
Editors and Affiliations
Rights and permissions
Copyright information
© 2008 Springer-Verlag
About this entry
Cite this entry
Popa, D. (2008). Microactuators. In: Li, D. (eds) Encyclopedia of Microfluidics and Nanofluidics. Springer, Boston, MA. https://doi.org/10.1007/978-0-387-48998-8_891
Download citation
DOI: https://doi.org/10.1007/978-0-387-48998-8_891
Publisher Name: Springer, Boston, MA
Print ISBN: 978-0-387-32468-5
Online ISBN: 978-0-387-48998-8
eBook Packages: EngineeringReference Module Computer Science and Engineering