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MEMS Packaging

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Packaging (and Wire Bonding)

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  • DOI: 10.1007/978-0-387-48998-8_881
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© 2008 Springer-Verlag

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(2008). MEMS Packaging. In: Li, D. (eds) Encyclopedia of Microfluidics and Nanofluidics. Springer, Boston, MA. https://doi.org/10.1007/978-0-387-48998-8_881

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