The electron microprobe analysis concept was developed by Castaing in the early 1950s, and electron microprobes became widely available in the 1970s. During the past three decades this technique has greatly improved the characterization of materials allowing routine non-destructive chemical analyses of minerals in situ.
Electron microprobe performs qualitative and quantitative X-ray spectrometric analyses, but its main function is quantitative analysis of very small volumes of materials. Under electron bombardment the sample's constituent atoms emit X-rays. The wavelengths of the X-rays are identified and their intensities measured by X-ray spectrometers (wavelength- or energy-dispersive) and detectors. Comparison of the sample's characteristic X-ray intensities with those of a standard, after correction for matrix effects, leads to quantitative analysis. The essential components and performances are detailed below.
The probe system
The electron microprobe consists of an electron gun...
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Wagner, C. (1998). Electron microprobe . In: Geochemistry. Encyclopedia of Earth Science. Springer, Dordrecht. https://doi.org/10.1007/1-4020-4496-8_92
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DOI: https://doi.org/10.1007/1-4020-4496-8_92
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