Metrology pp 1-28 | Cite as

Molecular Dynamics Characterization of a Force Sensor Integrated Fast Tool Servo for On-Machine Surface Metrology

  • Yindi CaiEmail author
Living reference work entry
Part of the Precision Manufacturing book series (PRECISION)


Establishment of the tool-workpiece contact, in which the diamond tool is set on the workpiece surface with a small contact force, determines the depth of cut accuracy in a force sensor-integrated fast tool servo (FS-FTS) for single point diamond microcutting and the scan force and scan depth in the following step of on-machine surface metrology. Molecular dynamics (MD) simulations are carried out to characterize the tool-workpiece contact process. It is clarified that even a small instability induced by the vibration of the workpiece atoms can generate large uncertainties in the subnanometric MD simulation results. Based on the vibration of the workpiece, atoms have a certain period determined by the MD model size; a multi-relaxation time method is proposed for reduction of the atom vibrations and stabilization of the MD model. It is confirmed that the proposed multi-relaxation time method is effective to eliminate the instability over a wide temperature range up to room temperature under which a practical microcutting or surface metrology process is carried out. An accurate elastic-plastic transition contact depth is then evaluated by observing the residual defects on the workpiece surface after the diamond tool is retracted back to its initial position.


Molecular dynamics Diamond tool Microcutting Surface metrology Contact depth Contact force Elastic-plastic transition Fast tool servo Surface damage Multi-relaxation time method Temperature 


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© Springer Nature Singapore Pte Ltd. 2019

Authors and Affiliations

  1. 1.Dalian University of TechnologySchool of Mechanical EngineeringDalianChina

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