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Metrology pp 1-28 | Cite as

Molecular Dynamics Characterization of a Force Sensor Integrated Fast Tool Servo for On-Machine Surface Metrology

  • Yindi CaiEmail author
Living reference work entry
Part of the Precision Manufacturing book series (PRECISION)

Abstract

Establishment of the tool-workpiece contact, in which the diamond tool is set on the workpiece surface with a small contact force, determines the depth of cut accuracy in a force sensor-integrated fast tool servo (FS-FTS) for single point diamond microcutting and the scan force and scan depth in the following step of on-machine surface metrology. Molecular dynamics (MD) simulations are carried out to characterize the tool-workpiece contact process. It is clarified that even a small instability induced by the vibration of the workpiece atoms can generate large uncertainties in the subnanometric MD simulation results. Based on the vibration of the workpiece, atoms have a certain period determined by the MD model size; a multi-relaxation time method is proposed for reduction of the atom vibrations and stabilization of the MD model. It is confirmed that the proposed multi-relaxation time method is effective to eliminate the instability over a wide temperature range up to room temperature under which a practical microcutting or surface metrology process is carried out. An accurate elastic-plastic transition contact depth is then evaluated by observing the residual defects on the workpiece surface after the diamond tool is retracted back to its initial position.

Keywords

Molecular dynamics Diamond tool Microcutting Surface metrology Contact depth Contact force Elastic-plastic transition Fast tool servo Surface damage Multi-relaxation time method Temperature 

References

  1. Aliofkhazrae M (ed) (2014) Anti-abrasive nanocoatings: current and future applications, 1st edn. Elsevier, CambridgeGoogle Scholar
  2. Brinksmeier E, Gläbe R, Schönemann L (2012) Diamond micro chiseling of large- scale retroreflective arrays. Precis Eng 36:650–657CrossRefGoogle Scholar
  3. Cai Y, Chen YL, Shimizu Y et al (2016a) Molecular dynamics simulation of subnanometric tool-workpiece contact on a force sensor-integrated fast tool servo for ultra-precision microcutting. Appl Surf Sci 369:354–365CrossRefGoogle Scholar
  4. Cai Y, Chen YL, Shimizu Y et al (2016b) Molecular dynamics simulation of elastic- plastic deformation associated with tool-workpiece contact in force sensor- integrated fast tool servo. Proc Inst Mech Eng Part B-J Eng Manuf.  https://doi.org/10.1177/0954405416673116CrossRefGoogle Scholar
  5. Chen YL, Gao W, Ju BF et al (2014) A measurement method of cutting tool position for relay fabrication of microstructured surface. Meas Sci Technol 25: 064018 (10pp)CrossRefGoogle Scholar
  6. Chen YL, Shimizu Y, Cai Y et al (2015a) Self-evaluation of the cutting edge contour of a microdiamond tool with a force sensor integrated fast tool servo on an ultra-precision lathe. Int J Adv Manuf Technol 77:2257–2267CrossRefGoogle Scholar
  7. Chen YL, Wang S, Shimizu Y et al (2015b) An in-process measurement method for repair of defective microstructures by using a fast tool servo with a force sensor. Precis Eng 39:134–142CrossRefGoogle Scholar
  8. Chen YL, Cai Y, Shimizu Y et al (2016) On-machine measurement of microtool wear and cutting edge chipping by using a diamond edge artifact. Precis Eng 43:462–467CrossRefGoogle Scholar
  9. Cheng K, Huo D (2013) Micro-cutting: fundamentals and applications. Wiley, LondonCrossRefGoogle Scholar
  10. Cheong WCD, Zhang L, Tanaka H (2001) Some essentials of simulation nano- surfacing processed using the molecular dynamics method. Key Eng Mater 196:31–42CrossRefGoogle Scholar
  11. Cheung CF, Lee WB (2003) Surface generation in ultra-precision diamond turning: modelling and practices. Professional Engineering Publishing Limited, LondonGoogle Scholar
  12. Faisal NH, Ahmed R, Goel S et al (2014) Influence of test methodology and probe geomrtry on nanoscale fatigue failure of diamond-like carbon film. Surf Coat Technol 242:42–53CrossRefGoogle Scholar
  13. Fang TH, Weng CI, Chang JG (2003) Molecular dynamics analysis of temperature effects on nanoindentation measurement. Mater Sci Eng A 357:7–12CrossRefGoogle Scholar
  14. Fang FZ, Zhang XD, Weckenmann A et al (2013) Manufacturing and measurement of freeform optics. CIRP Ann-Manuf Technol 62:823–846CrossRefGoogle Scholar
  15. Farzad P, Abdolreza R (2015) Numerical-experimental study on the mechanisms of material removal during magnetic abrasive finishing of brittle materials using extended finite element method. Proc Inst Mech Eng Part C-J Eng Mech Eng Sci 0:1–13Google Scholar
  16. Gao W, Hocken RJ, Patten JA et al (2000) Construction and testing of a nanomachining instrument. Precis Eng 24:320–328CrossRefGoogle Scholar
  17. Gao W, Araki T, Kiyono S et al (2003) Precision nano-fabrication and evaluation of a large area sinusoidal grid surface for a surface encoder. Precis Eng 27:289–298CrossRefGoogle Scholar
  18. Gao W, Aoki J, Ju BF et al (2007) Surface profile measurement of a sinusoidalgrid using an atomic force microscope on a diamond turning machine. Precis Eng 31:304–309CrossRefGoogle Scholar
  19. Gao W, Kim SW, Bosse H et al (2015) Measurement technologies for precision positioning. CIRP Ann-Manuf Technol 64:773–796CrossRefGoogle Scholar
  20. Goel S, Luo X, Reuben RL (2011) Atomistic aspects of ductile responses of cubic silicon carbide during nanometric cutting. Nanoscale Res Lett 6(9):589CrossRefGoogle Scholar
  21. Goel S, Beake B, Chan CW et al (2015) Twinning anisotropy of tantalum during nanoindentation. Mater Sci Eng A 627:249–261CrossRefGoogle Scholar
  22. Huang H, Zhao H (2015) Non-ideal assemble of the driving unit affecting shape of load-displacement curves. Meas Sci Technol 26(8):035601CrossRefGoogle Scholar
  23. Humphrey W, Dalke A, Schulten K (1996) VMD-visual molecular dynamics. J Mol Graph 14:33–38CrossRefGoogle Scholar
  24. Johnson KL (1985) Contact mechanics. Cambridge University, CambridgeCrossRefGoogle Scholar
  25. Lee KW, Noh YJ, Arai Y et al (2011) Precision measurement of micro-lens profile by using a force-controlled diamond cutting tool on an ultra-precision lathe. Int J Precis Technol 2:211–225CrossRefGoogle Scholar
  26. Mellor A, Hauser H, Wellens C et al (2013) Nanoimprinted diffraction gratings for crystalline silicon solar cells: implementation, characterization and simulation. Opt Express S2:A295–A304CrossRefGoogle Scholar
  27. Motoki T, Gao W, Kiyono S et al (2006) A nanoindentation instrument for mechanical property measurement of 3D micro/nano-structured surfaces. Meas Sci Technol 17:495–499CrossRefGoogle Scholar
  28. Müller M, Erhart P, Albe K (2007) Analytic bond-order potential for bcc and fcc iron-comparison with established eam potentials. J Phys Condens Matter 19(23):326220CrossRefGoogle Scholar
  29. Noh YJ, Arai Y, Tano M et al (2008) Fabrication of large-area micro-lens arrays with fast tool control. Int J Precis Eng Manuf 9:32–38Google Scholar
  30. Nosé S (2002) A molecular-dynamics method for simulations in the canonical ensemble. Mol Phys 100:191–198CrossRefGoogle Scholar
  31. Okamoto J (2014) Theoretical study of charge density waves in transition metal materials. Doctor thesis, Columbia UniversityGoogle Scholar
  32. Oliver WC (1992) An improved technique for determining hardness and elastic modulus using load and displacement sensing indentation experiments. J Mater Res 7:1564–1583CrossRefGoogle Scholar
  33. Özel T, Zeren E (2004) Determination of work material flow stress and friction for FEA of machining using orthogonal cutting tests. J Mater Process Technol 153-154:1019–1025CrossRefGoogle Scholar
  34. Page TF, Oliver WC, McHargue CJ (1992) The deformation behavior of ceramic crystals subjected to very low load (nano)indentations. J Mater Res 7:450–473CrossRefGoogle Scholar
  35. Pei QX, Lu C, Lee HP et al (2009) Study of materials deformation in nanometric cutting by large-scale molecular dynamics simulations. Nanoscale Res Lett 4:444–451CrossRefGoogle Scholar
  36. Plimpton S (1995) Fast parallel algorithms for short-range molecular dynamics. J Comput Phys 117:1–19CrossRefGoogle Scholar
  37. Qiu C, Zhu P, Fang F et al (2014) Study of nanoindentation behavior of amorphous alloy using molecular dynamics. Appl Surf Sci 305:101–110CrossRefGoogle Scholar
  38. Stukowski A (2010) Visualization and analysis of atomistic simulation data with OVITO-the Open Visualization Tool. Model Simul Mater Sci Eng 18(7):015012CrossRefGoogle Scholar
  39. Stukowski A (2012) Structure identification methods for atomistic simulations of crystalline materials. Model Simul Mater Sci Eng 20(15):045021CrossRefGoogle Scholar
  40. Sun J, Luo X, Chang W (2012) Fabrication of periodic nanostructures by singlepoint diamond turning with focused ion beam built tool tips. J Micromech Microeng 22(12):115014CrossRefGoogle Scholar
  41. Wang CX, Liu HY, Shi YY et al (1991) Calcluations of relative free energy surfaces in configuration space using an integration method. Chem Phys Lett 179:475–478CrossRefGoogle Scholar
  42. Wang CT, Jian SR, Jang SC (2008) Multiscale simulation of nanoindentation on Ni (100) thin film. Appl Surf Sci 255:3240–3250CrossRefGoogle Scholar
  43. Wu CD, Fang TH, Sung PH et al (2012) Critical size, recovery, and mechanical property of nanoimprinted Ni-Al alloys investigation using molecular dynamics simulation. Comput Mater Sci 53:321–328CrossRefGoogle Scholar
  44. Zhang L, Tanaka H (1997) Towards a deeper understanding of wear and friction on the atomic scale molecular dynamics analysis. Wear 211:44–53CrossRefGoogle Scholar
  45. Zhao KJ, Chen CQ, Shen YP et al (2009) Molecular dynamics study on the nanovoid growth in face-centered cubic single crystal copper. Comput Mater Sci 46:749–754CrossRefGoogle Scholar
  46. Zhu PZ, Hu YZ, Wang H et al (2011) study of effect of indenter shape in nanometric scratching process using molecular dynamics. Mater Sci Eng A 528:4522–4527CrossRefGoogle Scholar

Copyright information

© Springer Nature Singapore Pte Ltd. 2019

Authors and Affiliations

  1. 1.Dalian University of TechnologySchool of Mechanical EngineeringDalianChina

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