Micro-dimensional Measurement by a Micro-probing System
Micro-probing system has become a remarkable technique for the dimensional measurement of complex micrometric features on the micro-parts and precision tools. In especial, the tactile micro-probes are one of the most effective micro-probing systems since the miniaturized micro-stylus and high-sensitive probing sensor of the micro-probing systems allows both the capability of three-dimensional accessibility and nanometric resolution for the complex micrometric features. Therefore, there have been many efforts for the miniaturization of the stylus size with high-accuracy tip shape. In addition, since high sensitivity of the tactile micro-probing system is influenced by the external interaction force which has been ignored in the previous probing systems, new principle of the probing sensor and novel calibration method of the micro-probing system have been required.
On the other hand, the probe tip ball of the micro-probing systems is composed with the high-accuracy microsphere, so that their diameter is smaller than the micrometric features of the measuring workpiece generally in order to realize good accessibility for complex features. Therefore, precise qualification of the probe tip dimension is also important issues for the calibration of the micro-probing system because the uncertainty of the dimensional measurement is also affected by the geometrical tolerance of the probe tip shape. The uncertainty of the micro-dimensional measurement is dominated not only by the reliability of the micro-probe and the probe positioning instruments as well as the conventional probing system but also by the nanometer-scale deformation of the surface and the nanometric dimension of probe tip. In this chapter, a high-sensitive micro-probing system utilizing the local interaction force has been described. With respect to the compensation of the geometrical tolerance of the tip of the micro-probing system, an online qualification method has been introduced. Finally, dimensional measurement of micrometric feature by a micro-probing system is described, and its measurement results are investigated according to the uncertainty analysis.
KeywordsMicro-dimensional measurement Micro-probing system Micro-stylus Micro-CMM Shear-mode detection Gap width measurement Effective diameter Online qualification Gap width uniformity
- Bos EJC (2011) Aspects of tactile probing on the micro scale. Precis Eng 35:228–240. https://doi.org/10.1016/j.precisioneng.2010.09.010CrossRefGoogle Scholar
- Claverley JD, Leach RK (2013) Development of a three-dimensional vibrating tactile probe for miniature CMMs. Precis Eng 37:491–499. https://doi.org/10.1016/j.precisioneng.2012.12.008CrossRefGoogle Scholar
- Claverley JD, Leach RK (2015) A review of the existing performance verification infrastructure for micro-CMMs. Precis Eng 39:1–15. https://doi.org/10.1016/j.precisioneng.2014.06.006CrossRefGoogle Scholar
- Eoma SI, Takaya Y, Hayashi T (2009) Novel contact probing method using single fiber optical trapping probe. Precis Eng 33:235–242. https://doi.org/10.1016/j.precisioneng.2008.07.008CrossRefGoogle Scholar
- Ferreira N, Krah T, Jeong DC, Metz D, Kniel K, Dietzel A, Büttgenbach S, Hürtig F (2014) Integration of a silicon-based microprobe into a gear measuring instrument for accurate measurement of micro gears. Meas Sci Technol 25:064016. https://doi.org/10.1088/0957-0233/25/6/064016CrossRefGoogle Scholar
- Gao W (2010) Scanning micro-stylus system for measurement of micro-aspheric. In: Precision nanometrology. Springer series in advanced manufacturing, Springer, Germany, pp. 211–243Google Scholar
- Ito S, Chen YL, Shimizu Y, Kikuchi H, Gao W, Takahashi K, Kanayama T, Arakawa K, Hayashi A (2016a) Uncertainty analysis of slot die coater gap width measurement by using a shear mode micro-probing system. Precis Eng 43:525–529. https://doi.org/10.1016/j.precisioneng.2015.09.016CrossRefGoogle Scholar
- JCGM (2008) JCGM 100:2008 Evaluation of measurement data-guide to the expression of uncertainty in measurement (GUM) (International bureau of weights and measures). Bureau International des Poids et Mesures, ParisGoogle Scholar
- Manning B (2011) The use of non-contact thin gap sensors in controlling coater gapuniformity. Capacitec Inc. 2011. https://www.capacitec.com/. Accessed 8 Jan 2019
- Mitsubishi Material (2017) http://www.mmc-slotdie.com/. Accessed 31 Dec 2017