Chemical-Assisted Ion Beam Etching (CAIBE)Reference work entryFirst Online: 29 November 2016DOI: https://doi.org/10.1007/978-94-017-9780-1_100174 49 Downloads How to cite Ultraprecision Surfaces and Structures with Nanometer Accuracy by Ion Beam and Plasma Jet Technologies Copyright information© Springer Science+Business Media Dordrecht 2016