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Physical Vapor Deposition

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Acknowledgments

Yoke Khin Yap acknowledges the support from the National Science Foundation (Award number DMR-1261910).

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Authors and Affiliations

  1. Department of Physics, Michigan Technological University, 1400 Townsend Drive, Houghton, MI, 49931-1295, USA

    Yoke Khin Yap & Dongyan Zhang

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  1. Yoke Khin Yap
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  2. Dongyan Zhang
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Correspondence to Yoke Khin Yap .

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Editors and Affiliations

  1. Biomimetics (NLB²), Ohio State University Nanoprobe Lab. for Bio- & Nanotechnology, Columbus, Ohio, USA

    Bharat Bhushan

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Yap, Y.K., Zhang, D. (2015). Physical Vapor Deposition. In: Bhushan, B. (eds) Encyclopedia of Nanotechnology. Springer, Dordrecht. https://doi.org/10.1007/978-94-007-6178-0_362-3

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  • DOI: https://doi.org/10.1007/978-94-007-6178-0_362-3

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  • Online ISBN: 978-94-007-6178-0

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Chapter history

  1. Latest

    Physical Vapor Deposition
    Published:
    07 January 2016

    DOI: https://doi.org/10.1007/978-94-007-6178-0_362-3

  2. Original

    Physical Vapor Deposition
    Published:
    29 September 2015

    DOI: https://doi.org/10.1007/978-94-007-6178-0_362-2

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