Encyclopedia of Nanotechnology

Living Edition
| Editors: Bharat Bhushan

Physical Vapor Deposition

  • Yoke Khin YapEmail author
  • Dongyan Zhang
Living reference work entry

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DOI: https://doi.org/10.1007/978-94-007-6178-0_362-3

Synonyms

Definition

Physical vapor deposition (PVD) is referred to deposition processes of thin films and nanostructures through the evaporation of solid precursors into their vapor phase by physical approaches followed by the condensation of the vapor phase on substrates. The whole process consists of three stages: (1) evaporation of the solid source, (2) vapor phase transport from the source to the substrates, and (3) vapor condensation on the...

Keywords

Molecular Beam Epitaxy Boron Nitride Pulse Laser Deposition Physical Vapor Deposition Thin Film Deposition 
These keywords were added by machine and not by the authors. This process is experimental and the keywords may be updated as the learning algorithm improves.
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Notes

Acknowledgments

Yoke Khin Yap acknowledges the support from the National Science Foundation (Award number DMR-1261910).

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Copyright information

© Springer Science+Business Media Dordrecht 2015

Authors and Affiliations

  1. 1.Department of PhysicsMichigan Technological UniversityHoughtonUSA