Surface Dissipations in NEMS/MEMS
Surface dissipation is the mechanical energy loss caused by surface defects, such as dangling bonds, absorbates, and crystal termination defects. It becomes dominant as the dimensions of nanoelectromechanical systems (NEMS)/microelectromechanical systems (MEMS) resonators are reduced and the surface-to-volume ratio grows.
Nanoelectromechanical systems (NEMS)/microelectromechanical systems (MEMS) are systems integrating nanometer/micrometer-scale mechanical and electrical components. NEMS/MEMS resonators play an important role in viable commercial technologies and are becoming more and more prevalent in research applications; for example, micromechanical resonators are excellent transducers for force or mass detection [1, 2]. Advances in nanofabrication technology have enabled extreme miniaturization of resonant sensors. As tools for basic...
KeywordsMechanical Energy Dissipation Surface Loss Cantilever Surface Dime Atom Short Cantilever
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