CIRP Encyclopedia of Production Engineering

2019 Edition
| Editors: Sami Chatti, Luc Laperrière, Gunther Reinhart, Tullio Tolio

Scanning Tunneling Microscope

  • Fengzhou FangEmail author
  • Bingfeng JuEmail author
Reference work entry
DOI: https://doi.org/10.1007/978-3-662-53120-4_6596

Synonyms

Definition

Scanning tunneling microscope (STM) is an instrument for imaging conductive solid surfaces with an atomic resolution based on the concept of quantum tunneling.

Theory and Application

Introduction

STM was originally developed in 1981 by Gerd Binnig and Heinrich Rohrer (Binnig and Rohrer 1982), who were awarded the 1986 Nobel Prize in Physics for this great invention. Over the years, the STM has been proved to be an extremely versatile and powerful technique for many disciplines in material science (Yao and Wang 2004), precision engineering (Weckenmann and Hoffmann 2007; Hansen et al. 2006), physics, biology, and so on (Gao 2010).

The STM can be used not only in ultrahigh vacuum but also in ambient of air, water, liquid, or gas and at temperatures ranging from near-zero Kelvin to a few hundred degrees Celsius. Apart from surface topograph imaging, since the quantum tunneling also depends on the chemical nature of sample and tip, the STM...

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References

  1. Binnig G, Rohrer H (1982) Scanning tunneling microscopy. Helv Phys Acta 55:726–735Google Scholar
  2. Gao W (2010) Precision nanometrology: sensors and measuring systems for nanomanufacturing. Springer, LondonCrossRefGoogle Scholar
  3. Hansen HN, Carneiro K, Haitjema H, De Chiffre L (2006) Dimensional micro and nano metrology. CIRP Ann Manuf Technol 55(2):721–743CrossRefGoogle Scholar
  4. Hansma PK, Tersoff J (1987) Scanning tunneling microscopy. J Appl Phys 61(2):R1–R23CrossRefGoogle Scholar
  5. Weckenmann A, Hoffmann J (2007) Long range 3D scanning tunneling microscopy. CIRP Ann Manuf Technol 56(1):525–528CrossRefGoogle Scholar
  6. Whitehouse DJ (1994) Handbook of surface metrology. Institute of Physics Publishing, BristolGoogle Scholar
  7. Yao N, Wang ZL (eds) (2004) Handbook of microscopy for nanotechnology. Tsinghua University Press/Dordrecht, BeijingGoogle Scholar

Copyright information

© CIRP 2019

Authors and Affiliations

  1. 1.The State Key Laboratory of Precision Measuring Technology and Instruments, Centre of MicroNano Manufacturing TechnologyTianjin UniversityTianjinChina
  2. 2.Centre of MicroNano Manufacturing Technology (MNMT-Dublin)University College DublinDublinIreland
  3. 3.Department of Mechanical EngineeringZhejiang UniversityHangzhouChina