Ion Beam Machining
Ion beam machining (IBM) is an important nonconventional manufacturing technology used in micro-/nanofabrication, using a stream of accelerated ions by electrical means in a vacuum chamber to remove, add, or modify the atoms on the surface of the object. Mainly resulting from the energetic collision cascade, the ion beam removed or sputtered atoms from the workpiece by transferring sufficient ions’ energy and momentum to target atoms, and parts of the ions will finally implant into the substrate after losing energy (Machine Tool 2016; https://en.wikipedia.org/wiki/Ion_beam). IBM usually can be functional classified to ion sputtering/etching (remove material), ion sputter coating/ion-induced deposition (add material), and ion implantation (implant modification) (https://en.wikipedia.org/wiki/Ion_beam; Hellborg...
- Fang F, Xu Z (2015) State-of-the-art for nanomanufacturing using ion beam technology. In: Handbook of manufacturing engineering and technology. Springer, London, pp 1279–1315Google Scholar
- Hellborg R, Whitlow HJ, Zhang Y (2009) Ion beams in nanoscience and technology. Springer Science & Business Media, HeidelbergGoogle Scholar
- Hrnčíř T, Lopour F, Zadražil M, Delobbe A, Salord O, Sudraud P (2012) Novel plasma FIB/SEM for high speed failure analysis and real time imaging of large volume removal. In: ISTFA: conference proceedings from the 38th international symposium for testing and failure analysis, 2012, p 26Google Scholar
- Machine Tool (2016) In Encyclopædia Britannica. Retrieved from https://www.britannica.com/technology/machine-tool/Electrical-discharge-machining-EDM
- Xie X, Li S (2015) Ion beam figuring technology. In: Handbook of manufacturing engineering and technology. Springer, London, pp 1343–1390Google Scholar
- Xu ZW, Fang F, Zeng G (2015) Focused ion beam nanofabrication technology. In: Handbook of manufacturing engineering and technology. Springer, London, pp 1391–1423Google Scholar