CIRP Encyclopedia of Production Engineering

2019 Edition
| Editors: Sami Chatti, Luc Laperrière, Gunther Reinhart, Tullio Tolio


  • Matteo CalaonEmail author
  • Morten Hannibal Madsen
  • Richard Leach
Reference work entry



Scatterometry is a technique for measuring periodic structures on a surface with dimensions from a few nanometers to tens of micrometers. Scatterometry is a fast, nondestructive technique and is, therefore, suitable for in-line metrology.

Theory and Applications

The basic working principle of scatterometry is to use the information in the interference of light interacting with periodic structures, for example, a diffraction grating, to characterize a surface. The intensities of the resulting diffraction orders are used as a unique fingerprint for a given surface. Scatterometry is often applied where imaging techniques cannot be used due to a lack of resolution and can be considered a super-resolution technique.

The Principal Workflow

The principal workflow (Fig. 1) when performing scatterometry measurements uses an inverse modeling approach, with three steps: (1) the experimental measurement in which the light from an optical source...
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Copyright information

© CIRP 2019

Authors and Affiliations

  • Matteo Calaon
    • 1
    Email author
  • Morten Hannibal Madsen
    • 2
  • Richard Leach
    • 3
  1. 1.Department of Mechanical EngineeringTechnical University of DenmarkKongens LyngbyDenmark
  2. 2.Topsil GlobalWafers A/SFrederikssundDenmark
  3. 3.Department of Mechanical, Materials and Manufacturing EngineeringUniversity of NottinghamNottinghamUK

Section editors and affiliations

  • Han Haitjema
    • 1
  1. 1.Mitutoyo RCEBestThe Netherlands