CIRP Encyclopedia of Production Engineering

Living Edition
| Editors: Sami Chatti (Editor-in-Chief), Luc Laperrière (Editor-in-Chief), Gunther Reinhart (Editor-in-Chief), Tullio Tolio (Editor-in-Chief), The International Academy for Production

Ion Beam Machining

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DOI: https://doi.org/10.1007/978-3-642-35950-7_6485-4
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Synonyms

Focused ion beam; Ion beam etching; Ion beam figuring; Ion beam smoothing; Ion beam sputtering; Ion bombardment; Ion implantation; Sputter deposition

Definition

Ion beam machining (IBM) is an important nonconventional manufacturing technology used in micro-/nanofabrication, using a stream of accelerated ions by electrical means in a vacuum chamber to remove, add, or modify the atoms on the surface of the object. Mainly resulting from the energetic collision cascade, the ion beam removed or sputtered atoms from the workpiece by transferring sufficient ions’ energy and momentum to target atoms, and parts of the ions will finally implant into the substrate after losing energy (Machine Tool 2016; https://en.wikipedia.org/wiki/Ion_beam). IBM usually can be functional classified to ion sputtering/etching (remove material), ion sputter coating/ion-induced deposition (add material), and ion implantation (implant modification) (https://en.wikipedia.org/wiki/Ion_beam; Hellborg et al. 2009...

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References

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Copyright information

© CIRP 2018

Authors and Affiliations

  1. 1.State Key Laboratory of Precision Measuring Technology & Instruments, Centre of MicroNano Manufacturing TechnologyTianjin UniversityTianjinChina
  2. 2.Centre of MicroNano Manufacturing Technology (MNMT-Dublin)University College DublinDublinIreland
  3. 3.College of Precision Instrument and Opto-Electronic Engineering, Centre of MicroNano Manufacturing TechnologyTianjin UniversityTianjinChina

Section editors and affiliations

  • Ludger Overmeyer
    • 1
  1. 1.Institut für Transport- und AutomatisierungstechnikGottfried Wilhelm Leibniz Universität HannoverGarbsenDeutschland