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Porous Silicon for Microdevices and Microsystems

  • Luca De StefanoEmail author
  • Ilaria Rea
Living reference work entry

Later version available View entry history

Abstract

A literature survey is made of the various uses of both macroporous and mesoporous silicon in individual microdevices and complex microsystems. The material has been used as a silicon wafer processing tool where it is sacrificial: in a passive role where it provides, for example, thermal or electrical isolation and in an active role where it performs a range of functions. Examples include delivering drugs, sensing, emitting light, storing hydrogen, providing filtration, or having a catalytic role.

Keywords

Porous Silicon Sacrificial Layer Porous Silicon Layer Electrical Isolation Mesoporous Silicon 
These keywords were added by machine and not by the authors. This process is experimental and the keywords may be updated as the learning algorithm improves.

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Copyright information

© Springer International Publishing Switzerland 2014

Authors and Affiliations

  1. 1.IMM-CNR Institute for Microelectronics and Microsystems – Unit of NaplesNational Research CouncilNaplesItaly

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