Encyclopedia of Microfluidics and Nanofluidics

2015 Edition
| Editors: Dongqing Li

Membrane Actuation for Micropumps

  • Laxman SaggereEmail author
Reference work entry
DOI: https://doi.org/10.1007/978-1-4614-5491-5_871


Diaphragm actuation; Thick-film piezoelectric actuation; Thin-film actuation


Membrane actuation for micropumps refers to the reciprocating periodic motion of a thin flexible layer – diaphragm or membrane made of silicon or other materials – bounding one side of a displacement micropump to create volume and pressure oscillations in a fluid (i.e., liquid or gas) stored in the chamber of the micropump that is rectified by other means to accomplish a net fluid flow through the micropump. The mechanical energy necessary for the membrane actuation in micropumps is generally derived from electrical, thermal, optical, or other forms of energy.


Micropumps based on a variety of operating principles have been developed since early 1970s for pumping and/or precisely controlling fluid volumes on the order of a milliliter and below, which has enabled numerous emerging applications including dosing therapeutic drugs into the body, Lab-on-a-Chip diagnostic tools,...
This is a preview of subscription content, log in to check access.


  1. 1.
    Nguyen NT, Huang X, Chuan TK (2002) MEMS-micropumps: a review. J Fluids Eng Trans ASME 124(2):384–392Google Scholar
  2. 2.
    Laser DJ, Santiago JG (2004) A review of micropumps. J Micromech Microeng 14:R35–R64Google Scholar
  3. 3.
    Woias P (2001) Micropumps – summarizing the first two decades, microfluidics and BioMEMS. Proc SPIE 4560:39–52Google Scholar
  4. 4.
    Shoji S, Esashi M (1994) Microflow devices and systems. J Micromech Microeng 4:157–171Google Scholar
  5. 5.
    Polla DL, Francis LF (1998) Processing and characterization of piezoelectric materials and integration into microelectromechanical systems. Annu Rev Mater Sci 28:563–597Google Scholar
  6. 6.
    Polla DL, Erdman AG, Robbins WP, Markus DT, Diaz-Diaz J, Rizq R, Nam Y, Brickner TH (2000) Microdevices in medicine. Annu Rev Biomed Eng 2:551–576Google Scholar

Copyright information

© Springer Science+Business Media New York 2015

Authors and Affiliations

  1. 1.University of Illinois at ChicagoChicagoUSA