Encyclopedia of Systems and Control

Living Edition
| Editors: John Baillieul, Tariq Samad

Control for Precision Mechatronics

  • Tom OomenEmail author
Living reference work entry
DOI: https://doi.org/10.1007/978-1-4471-5102-9_100044-1


Motion systems are a key enabling technology in manufacturing machines and scientific instruments. Indeed, these motion systems perform the positioning with high speed and accuracy, where typical requirements are in the micrometer or even nanometer range. This is achieved through a mechatronic system design, which includes actuators, sensors, mechanics, and control. The aim of this entry is to outline advanced motion control for precision mechatronics. Both feedback and feedforward control are covered. Their specific designs are heavily influenced by considerations regarding efficient and accurate modeling techniques. Extensions to complex multivariable systems are outlined, as well as challenges induced by envisaged future application requirements.


Mechatronics Feedback control Feedforward control Learning control System identification 
This is a preview of subscription content, log in to check access.


  1. Åström KJ, Murray RM (2008) Feedback systems: an introduction for scientists and engineers. Princeton University Press, PrincetonCrossRefGoogle Scholar
  2. Blanken L, Boeren F, Bruijnen D, Oomen T (2017) Batch-to-batch rational feedforward control: from iterative learning to identification approaches, with application to a wafer stage. IEEE Trans Mechatron 22(2): 826–837CrossRefGoogle Scholar
  3. Bristow DA, Tharayil M, Alleyne AG (2006) A survey of iterative learning control: a learning-based method for high-performance tracking control. IEEE Control Syst Mag 26(3):96–114CrossRefGoogle Scholar
  4. Devasia S, Eleftheriou E, Moheimani S (2007) A survey of control issues in nanopositioning. IEEE Trans Control Syst Technol 15(5):802–823CrossRefGoogle Scholar
  5. Fleming AJ, Leang KK (2014) Design, modeling and control of nanopositioning systems. Springer, ChamCrossRefGoogle Scholar
  6. Gawronski WK (2004) Advanced structural dynamics and active control of structures. Springer, New YorkCrossRefGoogle Scholar
  7. Lambrechts P, Boerlage M, Steinbuch M (2005) Trajectory planning and feedforward design for electromechanical motion systems. Control Eng Pract 13: 145–157CrossRefGoogle Scholar
  8. Lee HS, Tomizuka M (1996) Robust motion controller design for high-accuracy positioning systems. IEEE Trans Ind Electron 43(1):48–55CrossRefGoogle Scholar
  9. Munnig Schmidt R, Schitter G, van Eijk J (2011) The design of high performance mechatronics. Delft University Press, DelftGoogle Scholar
  10. Ohnishi K, Shibata M, Murakami T (1996) Motion control for advanced mechatronics. IEEE Trans Mechatron 1(1):56–67CrossRefGoogle Scholar
  11. Oomen T (2018) Advanced motion control for precision mechatronics: control, identification, and learning of complex systems. IEEJ IEEE Trans Ind Appl 7(2): 127–140Google Scholar
  12. Pintelon R, Schoukens J (2012) System identification: a frequency domain approach, 2nd edn. IEEE Press, New YorkCrossRefGoogle Scholar
  13. Skogestad S, Postlethwaite I (2005) Multivariable feedback control: analysis and design, 2nd edn. John Wiley & Sons, West SussexzbMATHGoogle Scholar
  14. Steinbuch M, Norg ML (1998) Advanced motion control: An industrial perspective. Eur J Control 4(4):278–293CrossRefGoogle Scholar
  15. Voorhoeve R, van der Maas A, Oomen T (2018) Non-parametric identification of multivariable systems: A local rational modeling approach with application to a vibration isolation benchmark. Mech Syst Signal Process 105:129–152CrossRefGoogle Scholar

Copyright information

© Springer-Verlag London Ltd., part of Springer Nature 2020

Authors and Affiliations

  1. 1.Department of Mechanical EngineeringEindhoven University of TechnologyEindhovenThe Netherlands

Section editors and affiliations

  • S. O. Reza Moheimani
    • 1
  1. 1.University of Texas at DallasDallasUSA