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Cathodic Arc Technology

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Synonyms

Arc-PVD; Cathodic arc deposition; Cathodic arc evaporation; Vacuum arc deposition

Definition

Cathodic arc technology is a physical vapor deposition (PVD) technology that makes use of a supersonic stream of fully ionized plasma originating from nonstationary cathode spots. Depending on the cathode material and the presence of process gas, metal, ceramic, or diamond-like carbon films are obtained.

Scientific Fundamentals

Cathodic Arc Plasma Production

Arc discharges are characterized by relatively high current and low voltage between anode and cathode, the electrodes at positive and negative potential, respectively. Typical examples of such high current and low voltage are 100 A and 20 V. Generally, two types of arc discharges can be distinguished: the thermionic arc and the cathodic arc. The key difference is the physical mechanism of electron emission, and indeed, the electron emission mechanism can be used to more precisely distinguish the arc from other forms of discharges,...

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  • DOI: 10.1007/978-0-387-92897-5_1059
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Correspondence to André Anders .

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Anders, A. (2013). Cathodic Arc Technology. In: Wang, Q.J., Chung, YW. (eds) Encyclopedia of Tribology. Springer, Boston, MA. https://doi.org/10.1007/978-0-387-92897-5_1059

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