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Encyclopedia of Microfluidics and Nanofluidics

2008 Edition

| Editors: Dongqing Li

DRIE (Deep Reactive Ion Etching)

Reference work entry

DOI: https://doi.org/10.1007/978-0-387-48998-8_353

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Copyright information

© Springer-Verlag 2008

How to cite

Cite this entry as:: (2008) DRIE (Deep Reactive Ion Etching). In: Li D. (eds) Encyclopedia of Microfluidics and Nanofluidics. Springer, Boston, MA