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A Brief Introduction to MEMS and NEMS

  • Wendy C. CroneEmail author
Part of the Springer Handbooks book series (SHB)

Abstract

The expanding and developing fields of micro-electromechanical systems (MEMS) and nano-electromechanical (NEMS) are highly interdisciplinary and rely heavily on experimental mechanics for materials selection, process validation, design development, and device characterization. These devices range from mechanical sensors and actuators, to microanalysis and chemical sensors, to micro-optical systems and bioMEMS for microscopic surgery. Their applications span the automotive industry, communications, defense systems, national security, health care, information technology, avionics, and environmental monitoring. This chapter gives a general introduction to the fabrication processes and materials commonly used in MEMS/NEMS, as well as a discussion of the application of experimental mechanics techniques to these devices. Mechanics issues that arise in selected example devices are also presented.

Keywords

Residual Stress Chemical Vapor Deposition Particle Image Velocimetry Silicon Nitride Microfluidic Device 
These keywords were added by machine and not by the authors. This process is experimental and the keywords may be updated as the learning algorithm improves.

Abbreviations

AFM

atomic force microscopy

ASTM

American Society for Testing and Materials

CNT

carbon nanotube

CVD

chemical vapor deposition

DIC

digital image correlation

DMD

digital micromirror device

DPN

dip-pen nanolithography

DRIE

deep reactive-ion etching

EDM

electric-discharge machining

EDP

ethylenediamine pyrochatechol

FIB

focused ion beam

GMR

giant magnetoresistance

HEMA

2-hydroxyethyl methacrylate

LIGA

lithography galvanoforming molding

LPCVD

low-pressure CVD

MEMS

micro-electromechanical system

NEMS

nanoelectromechanical system

PDMS

polydimethylsiloxane

PIV

particle image velocimetry

PMMA

polymethyl methacrylate

PVD

physical vapor deposition

PVDF

polyvinylidene fluoride

SAM

scanning acoustic microscopy

SAM

self-assembled monolayer

SEM

Society for Experimental Mechanics

SEM

scanning electron microscopy

SMA

shape-memory alloy

SOI

silicon on insulator

SPM

scanning probe microscope

STM

scanning tunneling microscope

TMAH

tetramethylammonium hydroxide

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Copyright information

© Springer-Verlag 2008

Authors and Affiliations

  1. 1.Department of Engineering PhysicsUniversity of WisconsinMadisonUSA

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