Electron Beam Deposition
Reference work entry
DOI: https://doi.org/10.1007/3-540-29623-9_6875
Definition
EBD is an effect that is observed in scanning electron microscopy. An electron beam focused for a longer time at one position on a surface induces deposition of material originating from the gas phase of the not-perfect vacuum.
Copyright information
© Springer-Verlag 2006