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Metrology pp 1–23Cite as

Nanopositioning and Nanomeasuring Machines

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Part of the book series: Precision Manufacturing ((PRECISION))

Abstract

Continuing engineering progress in precision fabrication technologies, especially in the semiconductor industry, precision optics fabrication, and the diversified micro- and nanotechnologies, stimulates the advance in precision metrology. Fabricated structures reach atomic dimensions in ever-larger areas, thus becoming more and more complex, also in three dimensions. Consequently, measurements are made – to an increasing extent – of larger surface regions and sidewalls with higher aspect ratios as well as fully 3D micro- and nanostructures. Advanced high precision measurement technology is more and more an enabling technology for nanotechnologies. Today, nanopositioning and nanomeasuring machines provide high-precision measurements and the positioning of objects across different scales, from subnanometers up to several centimeters. This chapter deals with the requirements for highest measurement performance at the limits of physics and technology, resulting from the progress and the goals of modern high-tech fabrication technologies. The fundamentals of the nanopositioning and nanomeasuring machine, developed at the Institute of Process Measurement and Sensor Technology of the Ilmenau University of Technology and manufactured by the SIOS Meßtechnik GmbH Ilmenau, are described, and the measurement capabilities, potential applications, progress in research, and prospects of the device for the near future are pointed out.

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Notes

  1. 1.

    Courtesy of X-Fab Semiconductor Foundries AG

References

  • Abbe E (1890) Meßapparate für Physiker. Z Instrumentenkd 10:446–448

    Google Scholar 

  • Balzer FG, Hausotte T, Dorozhovets N, Manske E, Jäger G (2011) Tactile 3D microprobe system with exchangeable styli. Meas Sci Technol 22(9): 094018 (7pp), IOP Publishing, Bristol. ISSN 13616501

    Google Scholar 

  • Birli O, Franke K-H, Linß G, Machleidt T, Manske E, Schale F, Schwannecke H-C, Sparrer E, Weiß M (2013) Measurement, visualization and analysis of extremely large data sets with a nanopositioning and nanomeasuring machine. In: Conference: optical measurement systems for industrial inspection VIII. In: Proceedings of SPIE: Munich, Germany, 13–16 May 2013.vol 8788, pp 87880X (7 pp)

    Google Scholar 

  • Büchner H-J, Jäger G (2006) A novel plane mirror interferometer without using corner cube reflectors. Meas Sci Technol 17:746–752

    Article  Google Scholar 

  • Dorozhovets N, Hausotte T, Jäger G, Manske E (2007)Application of the metrological scanning probe microscope for high-precision, long-range, traceable measurements. In: Proc. of the SPIE 6616 (2007): Munich, Germany, 661624 (7 pp)

    Google Scholar 

  • Füßl R, Jäger G, Grünwald R, Schmidt I (2006) A new vectorial model for the estimation of uncertainty in nano coordinate measuring machines. In: XVIII IMEKO world congress. Metrology for a sustainable development, September 17–22, 2006, Rio de Janeiro, Brazil

    Google Scholar 

  • Füßl R, Manske E, Kreutzer Ph. Modeling of 3D-measuremnt chains in nanopositioning and nanomeasuring machines. In: Joint international IMEKO TC1+ TC7+ TC13 symposium, August 31st–September 2nd, 2011, Jena. urn:nbn:de:gbv:ilm1-2011imeko-38.7

    Google Scholar 

  • Hausotte T, Percle B, Gerhardt U, Dontsov D, Manske E, Jäger G (2012) Interference signal demodulation for nanopositioning and nanomeasuring machines. Meas Sci Technol 23:074004. (8pp)

    Article  Google Scholar 

  • Hofmann N, Tibrewala A, Balzer FG, Hausotte T, Manske E, Jäger G, Büttgenbach S (2009) Characterisation of the metrological properties of 3-D microprobes. In: Laser metrology and machine performance IX/International conference and exhibition on laser metrology, machine tool, CMM & robotic performance, 9 (Uxbridge). Euspen, Cranfield, pp 243–252

    Google Scholar 

  • Hofmann N, Mastylo R, Manske E et al (2015) A compact tactile surface profiler for multi-sensor systems in nano measuring machines. TM-Technisches Messen 82(7–8):377–383, Published: Jul 2015

    Google Scholar 

  • SIOS Stabilized HeNe Lasers. http://www.sios-de.com/products/stabilized-hene-lasers

  • Jäger G, Manske E, Hausotte T, Büchner H-J (2009) The metrological basis and operation of nanopositioning and nanomeasuring machine NMM-1. TM-Technisches Messen 5:227–234

    Google Scholar 

  • Jäger G, Manske E, Hausotte T, Müller A, Balzer F (2016) Nanopositioning and nanomeasuring machine NPMM-200 – a new powerful tool for large-range micro- and nanotechnology. Surf Topogr: Metrol Prop 4:034004

    Article  Google Scholar 

  • Kapusi D, Machleidt T, Manske E, Franke K-H, Jahn R (2008) White light interferometry, a new application for the nanopositioning and nanomeasuring machine. In: Proceedings of ICPM Ilmenau, Verl. ISLE, pp 37–38. ISBN 978-3-938843-38-3

    Google Scholar 

  • Küng A, Meli F, Thalmann R (2007) Ultraprecision micro-CMM using a low force 3D touch probe. Meas Sci Technol 18:319–327. https://doi.org/10.1088/0957-0233/18/2/S01

    Article  Google Scholar 

  • Machleidt T, Sparrer E, Manske E, Kapusi D, Franke K-H (2012) Area-based optical 2.5D sensors of a nanopositioning and nanomeasuring machine. Meas Sci Techno 23: 074010 (6 pp)

    Article  Google Scholar 

  • Manske E, Jäger G, Hausotte T, Füßl R (2012) Recent developments and challenges of nanopositioning and nanomeasuring technology. Meas Sci Techno 23: 074001 (10pp)

    Article  Google Scholar 

  • Manske E, Fröhlich T, Füßl R (2015) Measurement uncertainty consideration in the case of nonlinear models for precision length measurement. J Phys Conf Ser 588(1). https://doi.org/10.1088/1742-6596/588/1/012033

    Google Scholar 

  • Mastylo R, Dontsov D, Manske E, Jäger G (2005) A focus sensor for an application in a nanopositioning and nanomeasuring machine. In: SPIE, München, vol 5856, pp 238–244

    Google Scholar 

  • Schmidt I, Hausotte T, Gerhardt U, Manske E, Jäger G (2007) Investigations and calculations into decreasing the uncertainty of a nanopositioning and nanomeasuring machine. Meas Sci Technol 18:482–486

    Article  Google Scholar 

  • Vorbringer-Dorozhovets N, Manske E (2016) Scanning strategies for long term and long distance AFM measurements. In: Proceedings of the 16th international conference of the European Society for Precision Engineering and Nanotechnology: May 30th–3rd June 2016, Nottingham, UK. Euspen, Bedford, P1.60, 2 pp

    Google Scholar 

  • Vorbringer-Dorozhovets N, Goj B, Machleidt T, Franke K-H, Hoffmann M, Manske E (2014) Multifunctional nanoanalytics and long-range scanning probe microscope using a nanopositioning and nanomeasuring machine. Meas Sci Technol 25:044006 (7pp), https://doi.org/10.1088/0957-0233/25/4/044006

    Article  Google Scholar 

  • XPRESS Precision Engineering: Gannen series – 3D tactile scanning probes with nanometer uncertainty. http://www.xpresspe.com/download/Xpress-Gannen-series.pdf. 29 Nov 2017)

  • Yoshida Y, Miyake T, Kurata Y, Ishikawa T (1990) Three beam CD optical pickup using a holographic optical element. In: Proceedings of SPIE, vol 1401. Optical data storage technologies, Singapore, pp 58–65

    Google Scholar 

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Authors and Affiliations

  1. Department of Mechanical Engineering, Technische Universität Ilmenau, Ilmenau, Germany

    Eberhard Manske

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  1. Eberhard Manske
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Correspondence to Eberhard Manske .

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Editors and Affiliations

  1. Department of Nanomechanics, Tohoku University Department of Nanomechanics, Sendai, Miyagi, Japan

    Wei Gao

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Manske, E. (2019). Nanopositioning and Nanomeasuring Machines. In: Gao, W. (eds) Metrology. Precision Manufacturing. Springer, Singapore. https://doi.org/10.1007/978-981-10-4912-5_2-1

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  • DOI: https://doi.org/10.1007/978-981-10-4912-5_2-1

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  • Publisher Name: Springer, Singapore

  • Print ISBN: 978-981-10-4912-5

  • Online ISBN: 978-981-10-4912-5

  • eBook Packages: Springer Reference EngineeringReference Module Computer Science and Engineering

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