Abstract
We review μc-Si:H material’s properties, deposition techniques, and applications in solar cells. The focus is on the issues that limit μc-Si:H solar cell performance. Because of unintentional impurity incorporation, μc-Si:H shows an N-type conductivity, especially in the early days, μc-Si:H was used only as the doped layers. Meier et al. used VHF-PECVD technique with reduced impurity levels and made first μc-Si:H solar cell in 1994. Since then the research and development of μc-Si:H solar cells have attracted a great attention, and a significant progress has been made for using μc-Si:H as the bottom cell in multijunction structures. Compared to a-Si:H, μc-Si:H structure is much complicated with nanometer sized grains, grain boundaries, amorphous tissues, and microvoids. The complexity in the structure leads to complicated material properties, such as electronic structure, optical absorption, carrier transport, and stability. The material’s property affects the solar cell performance significantly. The material structure changes with the film thickness under a constant deposition condition, which influences the solar cell performance. For solar cell applications, it has been found that the best μc-Si:H material should be compact with a low defect density and a crystalline volume fraction around 50% in the whole absorber layer. In order to obtain a high photocurrent density, an effective light trapping is achieved using textured substrates. However, a high textured substrate causes a degradation of material quality. A thick μc-Si:H up to 5 μm requires a high rate deposition. Here, we will discuss the techniques for resolving the μc-Si:H issues and the approaches for achieving the high quality materials and high efficiency μc-Si:H solar cells.
References
L. Bai, B. Liu, J. Zhao, et al., J. Appl. Phys. 117, 175309 (2015a)
L. Bai, B. Liu, Q. Huang, et al., Sol. Energy Mater. Sol. Cells 140, 202 (2015b)
J. Bailat, E. Vallat-Sauvain, L. Feitknecht, C. Droz, A. Shah, J. Non-Cryst. Solids 1219, 299–302 (2002)
J. Bailat, D. Dominé, R. Schlüchter, J. Steinhauser, S. Fay, F. Freitas, C. Bücher, L. Feitknecht, X. Niquille, T. Tscharner, A. Shah, C. Ballif, Proc. 4th World Conf. on Photovoltaic Energy Conversion (Hawaii, 2006), p. 1533
C. Battaglia, C.-M. Hsu, K. Söderström, J. Escarre, F.-J. Haug, M. Charriere, M. Boccard, M. Despeisse, D.T.L. Alexander, M. Cantoni, Y. Cui, C. Ballif, ACS Nano 6, 2790 (2012)
M.H. Brodsky, M. Cardona, J.J. Cuomo, Phys. Rev. B 16, 3556 (1977)
P. Buehlmann, J. Bailat, D. Domine, A. Billet, F. Meillaud, A. Feltrin, et al., Appl. Phys. Lett. 91, 143505 (2007)
G. Bugnon, G. Parascandolo, T. Söderström, P. Cuony, M. Despeisse, S. Hänni, J. Holovský, F. Meillaud, C. Ballif, Adv. Funct. Mater. 22, 3665 (2012)
G. Bugnon, G. Parascandolo, S. Hänni, et al., Sol. Energy Mater. Sol. Cells 120, 143 (2014)
E. Bustarret, M.A. Hachicha, M. Brunel, Appl. Phys. Lett. 52, 1675 (1988)
R. Carius, J. Folsch, D. Lundszien, L. Houben, F. Finger, Mater. Res. Soc. Symp. Proc. 507, 813 (1998)
J.S. Cashmore, M. Apolloni, A. Braga, O. Caglar, V. Cervetto, Y. Fenner, S. Goldbach-Aschemann, C. Goury, J.E. Hötzel, T. Iwahashi, J. Kalas, M. Kitamura, M. Klindworth, M. Kupich, G.-F. Leu, J. Lin, M.-H. Lindic, P.A. Losio, T. Mates, D. Matsunaga, B. Mereu, X.-V. Nguyen, I. Psimoulis, S. Ristau, T. Roschek, A. Salabas, E.L. Salabas, I. Sinicco, Sol. Energy Mater. Sol. Cells 144, 84 (2016)
P. Chen, G. Hou, Q. Fan, J. Ni, J. Zhang, Q. Huang, X. Zhang, Y. Zhao, Sol. Energy Mater. Sol. Cells 143, 435 (2015)
Y.-B. Chung, D.-K. Lee, J.-S. Lim, N.-M. Hwang, Sol. Energy Mater. Sol. Cells 95, 211 (2011)
R.W. Collins, A.S. Ferlauto, G.M. Ferreira, C. Chen, J. Koh, R.J. Koval, Y. Lee, J.M. Pearce, C.R. Wronski, Sol. Energy Mater. Sol. Cells 78, 143 (2003)
L.R. Dahal, J. Li, J.A. Stoke, Z. Huang, A. Shan, A.S. Ferlauto, C.R. Wronski, R.W. Collins, N.J. Podraza, Sol. Energy Mater. Sol. Cells 129, 32 (2014)
P. Debye, P. Scherrer, Physik. Z. 17, 277 (1916)
C. Droz, E. Vallat-Sauvain, J. Bailat, L. Feitknecht, J. Meier, A. Shah, Sol. Energy Mater. Sol. Cells 81, 61 (2004)
T. Dylla, F. Finger, E.A. Schiff, Appl. Phys. Lett. 87, 032103 (2005)
F. Finger, in Thin-Film Silicon Solar Cells, ed. by A. Shah (Ed), (EPFL Press, Lausanne, 2010) Chapter 3
M. Fukawa, S. Suzuki, L. Guo, M. Kondo, A. Matsuda, Sol. Energy Mater. Sol. Cells 66, 217 (2001)
G. Ganguly, T. Ikeda, T. Nishimiya, K. Saitoh, M. Kondo, A. Matsuda, Appl. Phys. Lett. 69, 4224 (1996)
A. Gordijn, J.K. Rath, R.E.I. Schropp, Prog. in Photovoltaics: Res. and Appl 14, 305 (2006)
Q. Gu, Q. Wang, E.A. Schiff, Y.-M. Liand, C.T. Malone, J. Appl. Phys. 76, 2310 (1994)
L. Guo, M. Kondo, M. Fukawa, K. Saitoh, A. Matsuda, Jpn. J. Appl. Phys. 37, L1116 (1998)
S. Guha, J. Yang, P. Nath, M. Hack, Appl. Phys. Lett. 49, 218 (1986)
S. Guha, J. Yang, B. Yan, Sol. Energy Mater. Sol. Cells 119, 1 (2013)
X. Han, G. Hou, X. Zhang, C. Wei, G. Li, J. Zhang, X. Chen, D. Zhang, J. Sun, Y. Zhao, X. Geng, Sol. Energy Mater. Sol. Cells 94, 254 (2010)
Q. Huang, Y. Liu, S. Yang, Y. Zhao, X. Zhang, Solar Ener. Mater. & Sol. Cells 103, 134 (2012)
G. Hou, J. Fang, Q. Fan, C. Wei, J. Ni, X. Zhang, Y. Zhao, Sol. Energy Mater. Sol. Cells 134, 395 (2015)
J. Hüpkes, H. Zhu, J.I. Owen, G. Jost, E. Bunte, Thin Solid Films 520, 1913 (2012)
O. Isabella, A.H.M. Smets, M. Zeman, Sol. Energy Mater. Sol. Cells 129, 82 (2014)
Z. Iqbal, S. Veprek, J. Phys. C 15, 377 (1982)
B. Janthong, A. Hongsingthong, T. Krajangsang, L. Zhang, P. Sichanugrist, M. Konagai, J. Non-Cryst. Solids 358, 2478 (2012)
S.J. Jung, B.J. Kim, M. Shin, Sol. Energy Mater. Sol. Cells 121, 1 (2014)
H. Kakiuchi, H. Ohmi, K. Ouchi, K. Tabuchi, K. Yasutake, J. Appl. Phys. 106, 013521 (2009)
S. Kasouit, S. Kumar, R. Vanderhaghen, P. Roca i Cabarrocas, I. French, J. Non-Cryst. Solids 113, 299–302 (2002)
S. Kim, J.-W. Chung, H. Lee, J. Park, Y. Heo, H.-M. Lee, Sol. Energy Mater. Sol. Cells 119, 26 (2013)
S. Klein, F. Finger, R. Carius, T. Dylla, B. Rech, M. Grimm, L. Houben, M. Stutzmann, Thin Solid Films 430, 202 (2003)
J. Kocka, A. Fejfar, P. Fojtik, K. Luterova, I. Pelant, B. Rezek, H. Stuchlikova, J. Stuchlik, V. Svrcek, Sol. Energy Mater. Sol. Cells 66, 61 (2001)
J. Kocka, A. Fejfar, H. Stuchlıkova, J. Stuchlık, P. Fojtık, T. Mates, B. Rezek, K. Luterova, V. Svrcek, I. Pelant, Sol. Energy Mater. Sol. Cells 78, 493 (2003)
S. Komuro, Y. Aoyagi, Y. Segawa, S. Namba, A. Masuyama, H. Okamoto, Y. Hamakawa, J. Appl. Phys. 55, 3866 (1984)
M. Kondo, Sol. Energy Mater. Sol. Cells 78, 543 (2003)
U. Kroll, J. Meier, P. Torres, J. Pohl, A. Shah, J. Non-Cryst. Solids 68, 227–230 (1998)
A. Lambertz, T. Grundler, F. Finger, J. Appl. Phy. 109, 113109 (2011)
A. Lambertz, F. Finger, B. Holländer, J.K. Rath, R.E.I. Schropp, J. Non-Cryst. Solids 358, 1962 (2012)
A. Lambertz, V. Smirnov, T. Merdzhanova, K. Ding, S. Haas, G. Jost, R.E.I. Schropp, F. Finger, U. Rau, Sol. Energy Mater. Sol. Cells 119, 134 (2013)
M. Ledinsky, L. Fekete, J. Stuchlik, T. Mates, A. Fejfar, J. Kocka, J. Non-Cryst. Solids 352, 1209 (2006)
Y. Mai, S. Klein, R. Carius, et al., J. Non-Cryst. Solids 352, 1859 (2006)
T. Matsui, M. Kondo, K. Ogata, T. Ozawa, M. Isomura, Appl. Phys. Lett. 89, 142115 (2006)
T. Matsui, C.W. Chang, M. Kondo, K. Ogata, M. Isomura, Appl. Phys. Lett. 91, 10211 (2007)
T. Matsui, C.W. Chang, T. Takada, M. Isomura, H. Fujiwara, M. Kondo, Sol. Energy Mater. Sol. Cells 93, 1100 (2009)
T. Matsui, M. Kondo, Sol. Energy Mater. Sol. Cells 119, 156 (2013)
J. Meier, R. Fluckiger, H. Keppner, A. Shah, Appl. Phys. Lett. 65, 860 (1994a)
J. Meier, S. Dubail, R. Fluckiger, D. Fischer, H. Keppner, A. Shah, Proc. of 1st World Conference on Photovoltaic Energy Conversion (1994b), p. 409
J. Meier, P. Torres, R. Platz, S. Dubail, U. Kroll, J.A. Anna Selvan, N. Pellaton Vaucher, C. Hof, D. Fischer, H. Keppner, A. Shah, K.D. Ufert, P. Giannoulès, J. Koehler, Mater. Res. Soc. Symp. Proc. 420, 3 (1996)
J. Meier, S. Dubail, J. Cuperus, U. Kroll, R. Platz, P. Torres, J.A.A. Selvan, P. Pernet, N. Beck, N.P. Vaucher, C. Hof, D. Fischer, H. Keppner, A. Shah, J. Non-Cryst. Solids 1250, 227–230 (1998)
J. Meier, S. Dubail, S. Golay, U. Kroll, S. Fay, E. Vallat-Sauvain, L. Feitknecht, J. Dubail, A. Shah, Sol. Ener. Mater. & Sol. Cells 74, 457 (2002)
T. Merdzhanova, J. Woerdenweber, W. Beyer, T. Kilper, U. Zastrow, M. Meier, H. Stiebig, A. Gordijn, J. Non-Cryst. Solids 358, 2171 (2012)
J. MuKller, O. Kluth, S. Wieder, H. Siekmann, G. Schope, W. Reetz, O. Vetterl, D. Lundszien, A. Lambertz, F. Finger, B. Rech, H. Wagner, Sol. Ener. Mater. & Sol. Cells 66, 275 (2001)
J. Müller, G. Schöpea, O. Klutha, B. Recha, V. Sittingerb, B. Szyszkab, R. Geyerc, P. Lechnerc, H. Schadec, M. Rusked, G. Dittmare, H.-P. Bochemf, Thin Solid Films 442, 158 (2003)
Y. Nasuno, M. Kondo, A. Matsuda, Japn. J. Appl. Phys. 40, 303 (2001)
J. Ni, Q. Liu, J. Zhang, J. Ma, H. Wang, X. Zhang, Y. Zhao, Sol. Energy Mater. Sol. Cells 126, 6 (2014)
S. Nicolay, M. Despeisse, F.-J. Haug, C. Ballif, Solar Ener. Mater. & Sol. Cells 95, 1031 (2011)
C. Niikura, M. Kondo, A. Matsuda, J. Non-Cryst. Solids 42, 338–340 (2004)
C. Niikura, M. Kondo, A. Matsuda, Sol. Energy Mater. Sol. Cells 90, 3223 (2006)
A. Pawlikiewicz, S. Guha, Mater. Res. Soc. Symp. Proc. 118, 599 (1988)
S. Pillai, K.R. Catchpole, T. Trupke, M.A. Green, J. Appl. Phys. 101, 093105 (2007)
A. Poruba, A. Fejfar, Z. Remes, J. Springer, M. Vanecek, J. Kocka, J. Appl. Phys. 88, 148 (2000)
M. Python, O. Madani, D. Domine, F. Meillaud, E. Vallat-Sauvain, C. Ballif, Sol. Energy Mater. Sol. Cells 93, 1714 (2009)
S. Ray, S. Mukhopadhyay, T. Jana, R. Carius, J. Non-Cryst. Solids 761, 299–302 (2002)
B. Rezek, J. Stuchlík, A. Fejfar, J. Kočka, J. Appl. Phys. 92, 587 (2002)
Y. Sobajima, S. Nakano, T. Toyama, H. Okamoto, S. Omae, T. Minemoto, H. Takakura, Y. Hamakawa, J. Appl. Phys. 101, 103537 (2007)
T. Roschek, T. Repmann, J. Müller, B. Rech, H. Wagner, Proc. of 28th IEEE Photovoltaic Specialists Conference (IEEE, Anchorage, 2000), p. 150
H. Sai, H. Fujiwara, M. Kondo, Sol. Energy Mater. Sol. Cells 93, 1087 (2009)
H. Sai, Y. Kanamori, M. Kondo, Appl. Phys. Lett. 98, 113502 (2011)
H. Sai, K. Saito, M. Kondo, IEEE J. Photovoltaics 3, 5 (2012)
H. Sai, K. Maejima, T. Matsui, T. Koida, M. Kondo, S. Nakao, Jap. J. Appl. Phys 54(8S1), 08KB05 (2015)
A.V. Shah, J. Meier, E. Vallat-Sauvain, N. Wyrsch, U. Kroll, C. Droz, U. Graf, Sol. Energy Mater. Sol. Cells 78, 469 (2003)
L. Sivec, B. Yan, G. Yue, J. Owens-Mawson, J. Yang, S. Guha, IEEE J. Photovoltaics 2, 27 (2012)
V. Smirnov, A. Lambertz, B. Grootoonk, R. Carius, F. Finger, J. Non-Cryst. Solids 358, 1954 (2012)
T. Söderström, F.-J. Haug, V. Terrazzoni-Daudrix, X. Niquille, M. Python, C. Ballif, J. Appl. Phys. 104, 104505 (2008)
K. Söderströmn, G. Bugnon, F.-J. Haug, S. Nicolay, C. Ballif, Solar Ener. Mater. & Sol. Cells 101, 193 (2012a)
K. Söderströmn, G. Bugnon, R. Biron, C. Pahud, F. Meillaud, F.-J. Haug, C. Ballif, J. Appl. Phys. 112, 114503 (2012b)
P. Spinelli, V. E. Ferry, J. van de Groep, M. van Lare, M. A. Verschuuren, R. E. I. Schropp, .H. A. Atwater, and A. Polman, J. Opt. 14, 024002 (2012)
R.A. Street, Appl. Phys. Lett. 59, 1084 (1991)
C. Strobel, B. Leszczynska, U. Merkel, J. Kuske, D.D. Fischer, M. Albert, J. Holovský, S. Michard, J.W. Bartha, Sol. Energy Mater. Sol. Cells 143, 347 (2015)
H. Tan, L. Sivec, B. Yan, R. Santbergen, M. Zeman, A.H.M. Smets, App. Phys. Lett. 102, 153902 (2013)
H. Tan, E. Moulin, F.T. Si, et al., Progr. in Photovoltaics: Res. and Appl. 23, 949 (2015)
Y. Tawada, K. Tsuge, M. Kondo, H. Okamoto, Y. Hamakawa, J. Appl. Phys. 53, 5273 (1982)
A. Terakawa, Sol. Energy Mater. Sol. Cells 119, 204 (2013)
P. Torres, J. Meier, R. Fluckiger, U. Kroll, J.A.A. Selvan, H. Keppner, A. Shah, S.D. Littlewood, I.E. Kelly, P. Giannoules, Appl. Phys. Lett. 69, 1373 (1996)
R. Tsu, J. Gonzalez-Hernandez, S.S. Chao, S.C. Lee, K. Tanaka, Appl. Phys. Lett. 40, 534 (1982)
S. Usui, K. Kikuchi, J. Non-Cryst. Solids 34, 1 (1979)
E. Vallat-Sauvain, C. Droz, F. Meillaud, J. Bailat, A. Shah, C. Ballif, J. Non-Crystal. Solids 352, 1200 (2006a)
E. Vallat-Sauvain, A. Shah, J. Bailat, Advances in microcrystalline silicon solar cell technologies (Wiley, Chichester, 2006b), pp. 133–171
O. Vetterl, F. Finger, R. Carius, P. Hapke, L. Houben, O. Kluth, A. Lambertz, A. Mück, B. Rech, H. Wagner, Sol. Energy Mater. Sol. Cells 62, 97 (2000)
O. Vetterl, M. Hulsbeck, J. Wolff, R. Carius, F. Finger, Thin Solid Films 427, 46 (2003)
S. Veprek, V. Marecek, Solid State Electron. 11, 683 (1968)
O. Vettea, A. Groß, T. Jana, S. Ray, A. Lambertz, R. Carius, F. Finger, J. Non-Cryst. Solids 772, 299–302 (2002)
D.L. Williamson, Sol. Energy Mater. Sol. Cells 78, 41 (2003)
J. Woerdenweber, T. Merdzhanova, T. Zimmermann, A.J. Flikweert, H. Stiebig, W. Beyer, A. Gordijn, J. Non-Cryst. Solids 358, 2183 (2012)
K. Yamamoto, A. Nakajima, M. Yoshimi, et al., Prog. in Photovoltaics: Res. and Appl. 13, 489 (2005)
B. Yan, K. Lord, J. Yang, S. Guha, J. Smeets, J.-M. Jacquet, Mater. Res. Soc. Symp. Proc. 715, 629 (2002)
B. Yan, G. Yue, J. Yang, S. Guha, D.L. Williamson, D. Han, C.-S. Jiang, Mater. Res. Soc. Symp. Proc. 808, 575 (2004a)
B. Yan, G. Yue, J. Yang, S. Guha, D.L. Williamson, D. Han, C.-S. Jiang, Appl. Phys. Lett. 85, 1955 (2004b)
B. Yan, G. Yue, J.M. Owens, J. Yang, S. Guha, Appl. Phys. Lett. 85, 1925 (2004c)
B. Yan, C.-S. Jiang, C.W. Teplin, H.R. Moutinho, M.M. Al-Jassim, J. Yang, S. Guha, J. Appl. Phys. 101, 033712 (2007)
B. Yan, G. Yue, L. Sivec, J. Yang, S. Guha, C.-S. Jiang, Appl. Phys. Lett. 99, 113512 (2011)
B. Yan, G. Yue, L. Sivec, J. Owens-Mawson, J. Yang, S. Guha, Sol. Ener. Mater. & Sol. Cells 104, 13 (2012)
B. Yan, G. Yue, J. Yang, S. Guha, Sol. Energy Mater. Sol. Cells 111, 90 (2013)
L. Yang, L. Chen, J.Y. Hou, Y.M. Li, Mater. Res. Soc. Symp. Proc. 258, 365 (1992)
J. Yang, A. Banerjee, S. Guha, Appl. Phys. Lett. 70, 2975 (1997)
J. Yang, K. Lord, B. Yan, A. Banerjee, S. Guha, Proc. of 29th IEEE Photovoltaic Specialists Conference (IEEE, New Orleans, 2002), p. 1094
G. Yue, B. Yan, J. Yang, S. Guha, Appl. Phys. Lett. 86, 092103 (2005)
G. Yue, B. Yan, G. Ganguly, J. Yang, S. Guha, Mater. Res. Soc. Symp. Proc. 910, 29 (2006a)
G. Yue, B. Yan, G. Ganguly, J. Yang, S. Guha, C. Teplin, Appl. Phys. Lett. 88, 263507 (2006b)
G. Yue, B. Yan, G. Ganguly, J. Yang, S. Guha, J. Mater. Res. 22, 1128 (2007)
G. Yue, B. Yan, C.W. Teplin, J. Yang, S. Guha, J. Non-Crystal Solids 354, 2440 (2008)
G. Yue, B. Yan, L. Sivec, T. Su, Y. Zhou, J. Yang, S. Guha, Mater. Res. Soc. Symp. Proc. 1426, 33 (2012a)
G. Yue, B. Yan, L. Sivec, Y. Zhou, J. Yang, S. Guha, Sol. Energy Mater. Sol. Cells 104, 109 (2012b)
X. Zhang, G. Wang, X. Zheng, C. Wei, X. Geng, S. Xiong, Y. Zhao, Sol. Energy Mater. Sol. Cells 95, 2448 (2011)
X. Zhang, In OSA Light Energy Nanostructures and Advanced Materials for Photovoltaics (PV), Leipzig (2016)
Acknowledgments
The authors are grateful for the colleagues in the thin film silicon PV community. They have enjoyed very much for the collaborations with several institutions and sharing ideas and results through the international conferences such as the MRS, ICANS, IEEE-PVSEC, and EU-PVSEC. BY acknowledges the hospitality of the Nankai University.
Author information
Authors and Affiliations
Corresponding author
Editor information
Editors and Affiliations
Section Editor information
Rights and permissions
Copyright information
© 2018 Springer-Verlag GmbH Germany
About this entry
Cite this entry
Zhao, Y., Zhang, X., Bai, L., Yan, B. (2018). Hydrogenated Microcrystalline Silicon Thin Films. In: Yang, D. (eds) Handbook of Photovoltaic Silicon. Springer, Berlin, Heidelberg. https://doi.org/10.1007/978-3-662-52735-1_28-1
Download citation
DOI: https://doi.org/10.1007/978-3-662-52735-1_28-1
Received:
Accepted:
Published:
Publisher Name: Springer, Berlin, Heidelberg
Print ISBN: 978-3-662-52735-1
Online ISBN: 978-3-662-52735-1
eBook Packages: Springer Reference Chemistry and Mat. ScienceReference Module Physical and Materials ScienceReference Module Chemistry, Materials and Physics