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  • Reference work
  • © 2021

Handbook of Laser Micro- and Nano-Engineering


  • Covers all fundamentals and applications of laser engineering

  • Details recent advances in ultrafast laser processing

  • Highlights practical and commercial applications

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  • ISBN: 978-3-030-63647-0
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  • Tax calculation will be finalised during checkout
Hardcover Book USD 1,399.99
Price excludes VAT (USA)

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Table of contents (57 entries)

  1. Front Matter

    Pages i-xxviii
  2. Fundamentals of Laser-Matter Interaction

    1. Front Matter

      Pages 1-1
    2. Laser-Induced Non-thermal Processes

      • Aida Naghilou, Oskar Armbruster, Wolfgang Kautek
      Pages 61-82
    3. Laser-Induced Thermal Processes: Heat Transfer, Generation of Stresses, Melting and Solidification, Vaporization, and Phase Explosion

      • Maxim V. Shugaev, Miao He, Yoann Levy, Alberto Mazzi, Antonio Miotello, Nadezhda M. Bulgakova et al.
      Pages 83-163
    4. Laser Interactions with Organic/Polymer Materials

      • Esther Rebollar, Marta Castillejo
      Pages 165-212
  3. Laser Systems

    1. Front Matter

      Pages 273-273
    2. CO2 Lasers

      • Takahisa Jitsuno, Kazuyuki Uno
      Pages 275-297
    3. Fiber Lasers

      • Zhigang Zhao, Yohei Kobayashi, Shibin Jiang
      Pages 299-330
    4. Ultrashort Pulse Lasers

      • Daijun Li, Keming Du
      Pages 331-365
    5. Excimer Lasers for Lithography and Annealing

      • Hakaru Mizoguchi, Toshihiro Oga, Kouji Kakizaki, Junichi Fujimoto, Burkhard Fechner
      Pages 367-427
    6. EUV Sources

      • Hakaru Mizoguchi, Akira Endo, Tatsuya Yanagida, Hiroaki Nakarai, Toshihiro Oga
      Pages 429-491
  4. Optics and Processing Apparatus

    1. Front Matter

      Pages 493-493
    2. Basic and General Optics for Laser Processing

      • Kunihiko Washio
      Pages 495-526
    3. Optics for Beam Shaping in Laser Processing

      • Jian Xu, Ya Cheng, Koji Sugioka
      Pages 527-543
    4. Optics and Apparatus for CO2 and CO Laser Micro-processing

      • Arndt Hohnholz, Katharina Rettschlag, Michael Desens, Patrick A. Taschner, Ludger Overmeyer
      Pages 599-635
    5. Optics and Apparatus for Solid State Laser Micro-processing

      • Xiaoxu Deng, Minglie Hu
      Pages 637-669

About this book

This handbook provides a comprehensive review of the entire field of laser micro and nano processing, including not only a detailed introduction to individual laser processing techniques but also the fundamentals of laser-matter interaction and lasers, optics, equipment, diagnostics, as well as monitoring and measurement techniques for laser processing. Consisting of 11 sections, each composed of 4 to 6 chapters written by leading experts in the relevant field. Each main part of the handbook is supervised by its own part editor(s) so that high-quality content as well as completeness are assured. The book provides essential scientific and technical information to researchers and engineers already working in the field as well as students and young scientists planning to work in the area in the future. 
Lasers found application in materials processing practically since their invention in 1960, and are currently used widely in manufacturing. The main driving force behind this fact is that the lasers can provide unique solutions in material processing with high quality, high efficiency, high flexibility, high resolution, versatility and low environmental load. Macro-processing based on thermal process using infrared lasers such as CO2 lasers has been the mainstream in the early stages, while research and development of micro- and nano-processing are becoming increasingly more active as short wavelength and/or short pulse width lasers have been developed. In particular, recent advances in ultrafast lasers have opened up a new avenue to laser material processing due to the capabilities of ultrahigh precision micro- and nanofabrication of diverse materials. 

This handbook is the first book covering the basics, the state-of-the-art and important applications of the dynamic and rapidly expanding discipline of laser micro- and nanoengineering. This comprehensive source makes readers familiar with a broad spectrum of approaches to solve all relevant problems in science and technology. This handbook is the ultimate desk reference for all people working in the field.


  • Laser Additive Processing
  • Laser Ablation at nanoscale
  • Laser Nanotechnology
  • Laser Material Removal
  • Laser Material Deposition
  • Laser surface Diagnostics
  • Laser Metrology and materials characterisation
  • Ultrafast laser material processing
  • Handbook Laser Engineering
  • Handbook Nanoengineering
  • Laser subtractive processing
  • Laser surface structuring


“The value of this book derives from the extensive scope of its contents, which covers laser ablative and additive techniques to modify materials, the production of 2D and 3D devices, and biomedical applications. … The cross-references are helpful.” (Barry R. Masters, Optics & Photonics News,, May 26, 2022)

Editors and Affiliations

  • RIKEN Center for Advanced Photonics, Wako, Japan

    Koji Sugioka

About the editor

Koji Sugioka (Editor-in-Chief), RIKEN Center for Advanced Photonics, Wako, Saitama, Japan

Koji Sugioka was born in 1961 in Hiroshima, japan. He received his B. S., Ms. Eng., and Dr. Eng. Degrees in electronics from Waseda University (Japan) in 1984, 1986, and 1993, respectively. He Joined RIKEN in 1986 and is currently a Team Leader of Advanced Laser Processing Research Team at RIKEN Center for Advanced Photonics. He was concurrently a guest professor at Osaka University (2018 – 2019), and a visiting professor at Kyoto University (2016 – 2017), Tokyo Denki University (2004 – 2020), and Tokyo University of Science (2016 – 2017). He was awarded the degree of Doctor Honoris Causa from University of Szeged (Hungary) in 2018.

Koji Sugioka has made important contribution to both fundamental researches on laser-matter interactions and diverse applications including practical use in the said area. He is internationally renowned for his works on laser doping, laser etching, laser surface modification, laser-induced selective metallization, microfabrication of transparent materials, VUV laser processing, laser surface nanostructuring, and 3D micro and nano fabrication. In particular, he is known as a leading scientist in the ultrafast laser processing technology. His current research interests include ultrafast laser processing for fabrication of functional 3D micro and nano systems, nanofabrication, nanostructuring and synthesis of nanomaterials, and tailored laser beam processing for high-efficiency, high-quality, super-resolution micro and nano processing.

He received 26 awards for his research, inventions and contributions in the area of laser micro and nano processing. He published more than 220 articles in international peer-reviewed journals, gave more than 190 invited talks including 15 plenary talks, 14 keynote talks, and 11 tutorial talks at international conferences, and holds 19 licensed patents. He also edited 5 books including 2 books in English, and was an author or a co-author of two books and 16 book chapters in English.

Koji Sugioka is currently a vice president of the Intl. Academy of Photonics and Laser Engineering (IAPLE), a member of the board of trustees of the Laser Institute of America (LIA), a member of board of directors of Japanese Laser Processing Society (JLPS) and the Japan Society of Laser Technology, and a Fellow of the International Society for Optics and Photonics (SPIE), the Optical Society of America (OSA), LIA, and IAPLE. He is also an editor-in-chief of Journal of the Laser Micro/Nanoengineering (JLMN), and an editor of Nanomaterials, International Journal of Extreme Manufacturing (IJEM), Opto-Electronic Advances (OEA) and Advanced Optical Technology (AOT). He organized numerous international conferences as a conference chair or co-chair, including SPIE Photonics West LASE, Conference on Laser Ablation (COLA), International Conference on Photo-Excited Processes and Applications (ICPEPA), International Conference on Applications of Lasers & Electro-Optics (ICALEO), and so on. In particular, he is also known as one of founders of International Symposium on Laser Precision Microfabrication (LPM).

Section Editors:  

Milan Brandt, School of Engineering, RMIT University (Royal Melbourne Institute of Technology), Melbourne, Australia

Nadezhda M. Bulgakova, HiLASE Centre, Institute of Physics of the Czech Academy of Sciences Dolní Břežany, Czech Republic

Ya Cheng, State Key Laboratory of Precision Spectroscopy, School of Physics and Electronic Science, East China Normal University, Shanghai, China                                   XXL – The Extreme Optoelectromachanics Laboratory, School of Physics and Electronic Science, East China Normal University, Shanghai, China                                                State Key Laboratory of High Field Laser Physics Shanghai Institute of Optics and Fine Mechanics, Chinese Academy of Sciences, Shanghai, China

Keming Du, EdgeWave GmbH, Innovative Laser Solutions, Würselen, Germany

Lin Li, Department of Mechanical, Aerospace and Civil Engineering, Faculty of Science and Engineering, Laser Processing Research Centre, The University of Manchester, Manchester, UK

Yongfeng Lu, Laser-Assisted Nano Engineering Lab, Department of Electrical and Computer Engineering, University of Nebraska-Lincoln, Lincoln, NE, USA

Minghui Hong, Department of Electrical and Computer Engineering, National University of Singapore, Singapore, Singapore

Andreas Ostendorf, Ruhr University Bochum, Applied Laser Technologies, Universitaetsstr. 150, Bochum, Germany

Koji Sugioka, RIKEN Center for Advanced Photonics, Wako, Saitama, Japan

Kunihiko Washio, Paradigm Laser Research Ltd., Machida, Tokyo, Japan

Leonid V. Zhigilei, Department of Materials Science and Engineering, University of Virginia, Charlottesville, VA, USA

Minlin Zhong, Laser Materials Processing Research Center, School of Materials Science and Engineering, Tsinghua University, Beijing, China

Bibliographic Information

Buying options

eBook USD 1,399.99
Price excludes VAT (USA)
  • ISBN: 978-3-030-63647-0
  • Instant PDF download
  • Readable on all devices
  • Own it forever
  • Exclusive offer for individuals only
  • Tax calculation will be finalised during checkout
Hardcover Book USD 1,399.99
Price excludes VAT (USA)