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Fabrication of Microelectrodes Using the Lift-Off Technique

  • Benjamin Y. Park
  • Rabih Zaouk
  • Marc J. Madou
Part of the Methods In Molecular Biology™ book series (MIMB, volume 321)

Abstract

The lift-off technique is one of the most prevalent methods for fabricating microelectrodes on a flat surface (e.g., a silicon [Si] wafer). It represents an alternative for metaletching techniques that often utilize hazardous chemicals in order to define a pattern. This chapter presents an example of patterning gold electrodes on an Si wafer.

Key Words

Photoresist gold lift-off technique chlorobenzene Si wafer 

Copyright information

© Humana Press Inc. 2006

Authors and Affiliations

  • Benjamin Y. Park
    • 1
  • Rabih Zaouk
    • 1
  • Marc J. Madou
    • 1
  1. 1.Department of Mechanical EngineeringUniversity of California-IrvineIrvine

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