Skip to main content
SpringerLink
Log in
Book cover

Biological Microarrays pp 261–279Cite as

Progress Report on Microstructured Surfaces Based on Chemical Vapor Deposition

  • Protocol
  • First Online:

Part of the book series: Methods in Molecular Biology ((MIMB,volume 671))

Abstract

This book chapter discusses recent advances in the fabrication of microscale surface patterns using chemical vapor deposition polymerization. Reactive poly(p-xylylene) (PPX) coatings are useful for their ability to immobilize specific biomolecules, as determined by the PPX functional group. PPXs can either be modified postdeposition, or they can be patterned onto a substrate in situ. Specific methods discussed in this progress report include microcontact printing, vapor-assisted micropatterning in replica structures, projection lithography-based patterning, and selective polymer deposition.

This is a preview of subscription content, log in via an institution.

Protocol
USD   49.95
Price excludes VAT (USA)
  • Available as PDF
  • Read on any device
  • Instant download
  • Own it forever
eBook
USD   84.99
Price excludes VAT (USA)
  • Available as EPUB and PDF
  • Read on any device
  • Instant download
  • Own it forever
Softcover Book
USD   139.99
Price excludes VAT (USA)
  • Compact, lightweight edition
  • Dispatched in 3 to 5 business days
  • Free shipping worldwide - see info
Hardcover Book
USD   109.99
Price excludes VAT (USA)
  • Durable hardcover edition
  • Dispatched in 3 to 5 business days
  • Free shipping worldwide - see info

Tax calculation will be finalised at checkout

Purchases are for personal use only

Learn about institutional subscriptions

Springer Nature is developing a new tool to find and evaluate Protocols. Learn more

References

  1. A. Berg, W. Olthius, P. Bergveld, “Micro Total Analysis Systems” 2000, 1st edition, Kluwer, Dordrecht, The Netherlands, 2000.

    Google Scholar 

  2. P. Li, D. J. Harrison, “Transport, manipulation, and reaction of biological cells on-chip using electrokinetic effects” Anal. Chem. 1997, 69, 1564.

    Article  CAS  Google Scholar 

  3. H. Mao, T. Yang, P. S. Cremer, “Design and characterization of immobilized enzymes in microfluidic systems” Anal. Chem. 2002, 74, 379.

    Article  CAS  Google Scholar 

  4. S. H. Chen, W. C. Sung, G. B. Lee, Z. Y. Lin, P. W. Chen, P. C. Liao, “A disposable poly(methylmethacrylate)-based microfluidic module for protein identification by nanoelectrospray ionization-tandem mass spectrometry” Electrophoresis 2001, 22, 3972.

    Article  CAS  Google Scholar 

  5. C. S. Effenhauser, J. M. Bruin, A. Paulus, M. Ehrat, “Integrated capillary electrophoresis on flexible silicone microdevices: analysis of DNA restriction fragments and detection of single DNA molecules on microchips” Anal. Chem. 1997, 69, 3451.

    Article  CAS  Google Scholar 

  6. J. Monahan, A. A. Gewirth, R. G. Nuzzo, “Indirect fluorescence detection of simple sugars via high-pH electrophoresis in poly(dimethylsiloxane) microfluidic chips” Electro­phoresis 2002, 23(14), 2347.

    Article  CAS  Google Scholar 

  7. J.C. Love, L.A. Estroff, J.K. Kriebel, R.G. Nuzzo, G.M. Whitesides, “Self-assembled monolayers of thiolates on metals as a form of nanotechnology” Chem. Rev. 2005, 105, 4, 1103–1169.

    Article  CAS  Google Scholar 

  8. D. Falconnet, G. Csucs, H. M. Grandin, M. Textor, “Surface engineering approaches to micropattern surfaces for cell-based assays” Biomaterials 2006, 27, 16, 3044–3063.

    Article  CAS  Google Scholar 

  9. D. S. Ginger, H. Zhang, C. A. Mirkin, “The evolution of Dip-Pen nanolithography” Angew. Chem. Int. Ed. 2004, 43, 30.

    Article  Google Scholar 

  10. S. Kramer, R. R. Fuierer, C. B. Gorman, “Scanning probe lithography using self-assembled monolayers” Chem. Rev. 2003, 103, 4367.

    Article  Google Scholar 

  11. S. Y. Chou, P. R. Krauss, P. J. Renstrom, “Imprint of sub-25 nm vias and trenches in polymers” App. Phys. Lett. 1995, 67, 3114.

    Article  CAS  Google Scholar 

  12. S. Y. Chou, P. R. Krauss, P. J. Renstrom, “Imprint Lithography with 25-Nanometer Resolution” Science 1996, 272, 85.

    Article  CAS  Google Scholar 

  13. Y. N. Xia, G. M. Whitesides, “Soft lithography” Ann. Rev. Mater. Sci. 1998, 28, 153.

    Article  CAS  Google Scholar 

  14. A. Kumar, G. M. Whitesides, “Features of gold having micrometer to centimeter dimensions can be formed through a combination of stamping with an elastomeric stamp and an alkanethiol “ink” followed by chemical etching” App. Phys. Lett. 1993, 63, 2002.

    Google Scholar 

  15. J. L. Wilbur, A. Kumar, E. Kim, G. M. Whitesides, “Microfabrication by microcontact printing of self-assembled monolayers” Adv. Mater. 1994, 6, 600.

    Article  CAS  Google Scholar 

  16. Y. N. Xia, E. Kim, X. M. Zhao, J. A. Rogers, M. Prentiss, G. M. Whitesides, “Complex optical surfaces formed by replica molding against elastomeric masters” Science 1996, 273, 347.

    Article  CAS  Google Scholar 

  17. X. M. Zhao, Y. N. Xia, G. M. Whitesides, “Fabrication of three-dimensional micro-structures: Microtransfer molding” Adv. Mater. 1996, 8, 837.

    Article  CAS  Google Scholar 

  18. E. Kim, Y. N. Xia, G. M. Whitesides, “Polymer microstructures formed by moulding in capillaries” Nature 1995, 376, 581.

    Article  CAS  Google Scholar 

  19. E. Kim, Y. N. Xia, X. M. Zhao, G. M. Whitesides, “Solvent-assisted microcontact molding: A convenient method for fabricating three-dimensional structures on surfaces of polymers” Adv. Mater. 1997, 9, 651.

    Article  CAS  Google Scholar 

  20. K. Y. Suh, Y. S. Kim, H. H. Lee, “Capillary force lithography” Adv. Mater. 2001, 13, 1386.

    Article  CAS  Google Scholar 

  21. W. T. Tsang, A. Y. Cho, “Molecular beam epitaxial writing of patterned GaAs epilayer structures” App. Phys. Lett. 1978, 32, 491.

    Article  CAS  Google Scholar 

  22. T. Schallenberg, T. Borzenko, G. Schmidt, M. Obert, G. Bacher, C. Schumacher, G. Karczewski, L. W. Molenkamp, S. Rodt, R. Heitz, D. Bimberg, “Controlled self-assembly of semiconductor quantum dots using shadow masks” App. Phys. Lett. 2003, 82, 4349.

    Article  CAS  Google Scholar 

  23. S. De Vusser, S. Steudel, K. Myny, J. Genoe, P. Heremans, “Integrated shadow mask method for patterning small molecule organic semiconductors” App. Phys. Lett. 2006, 88, 103501.

    Article  Google Scholar 

  24. D. C. Duffy, R. J. Jackman, K. M. Vaeth, K. F. Jensen, G. M. Whitesides, “Electroluminescent materials with feature sizes as small as 5 μm using elastomeric membranes as masks for dry lift-off” Adv. Mater. 1999, 11, 546.

    Article  CAS  Google Scholar 

  25. N. Takano, L. M. Doeswijk, M. A. F. van den Boogaart, J. Auerswald, H. F. Knapp, O. Dubochet, T. Hessler, J. Brugger, “Fabrication of metallic patterns by microstencil lithography on polymer surfaces suitable as microelectrodes in integrated microfluidic systems” J. Micromech. Microeng. 2006, 16, 1606.

    Article  Google Scholar 

  26. B. R. Ringeisen, J. Callahan, P. K. Wu, A. Pique, B. Spargo, R. A. McGill, M. Bucaro, H. Kim, D. M. Bubb, D. B. Chrisey, “Novel laser-based deposition of active protein thin films” Langmuir 2001, 17, 3472.

    Article  CAS  Google Scholar 

  27. E. Ostuni, R. Kane, C. S. Chen, D. E. Ingber, G. M. Whitesides, “Patterning mammalian cells using elastomeric membranes” Langmuir 2000, 16, 7811.

    Article  CAS  Google Scholar 

  28. R. Pal, K. E. Sung, M. A. Burns, “Microstencils for the patterning of nontraditional materials” Langmuir 2006, 22, 5392.

    Article  CAS  Google Scholar 

  29. D. G. Castner, B. D. Ratner, “Biomedical surface science: foundations to frontiers” Surf. Sci. 2002, 500, 28.

    Article  CAS  Google Scholar 

  30. P. Rai-Choudhury, “Handbook of Micro-lithography, Micromachining, and Microfabri-cation. Volume 1: Microlithography”, SPIE-The International Society for Optical Engineering, 1997.

    Google Scholar 

  31. F. Cerrina, “X-ray imaging: applications to patterning and lithography” J. Phys. D Appl. Phys. 2000, 33, R103.

    Article  CAS  Google Scholar 

  32. N. Yao, Z. L. Wang, Handbook of Microscopy for Nanotechnology, Springer, Berlin, 2005.

    Book  Google Scholar 

  33. A. A. Tseng, “Recent developments in nanofabrication using ion projection lithography” Small 2005, 1, 594.

    Article  CAS  Google Scholar 

  34. D. Meschede, H. Metcalf, “Atomic nanofabrication: atomic deposition and lithography by laser and magnetic forces” J. Phys. D Appl. Phys. 2003, 36, R17.

    Article  CAS  Google Scholar 

  35. E. Delamarche, A. Bernard, H. Schmid, A. Bietsch, B. Michel, H. Biebuyck, “Microfluidic networks for chemical patterning of substrates: design and application to bioassays” J. Am. Chem. Soc. 1998, 120, 500–508.

    Article  CAS  Google Scholar 

  36. S. Takayama, J. C. McDonald, E. Ostuni, M. N. Liang, P. J. A. Kenis, R. F. Ismagilov, G. M. Whitesides, “Patterning cells and their environments using multiple laminar fluid flows in capillary networks” Proc. Natl. Acad. Sci. U.S.A. 1999, 96, 5545–5548.

    Article  CAS  Google Scholar 

  37. B. Regenberg, U. Kruehne, M. Beyer, L.H. Pedersen, M. Simon, O.R.T. Thomas, J. Nielsen, T. Ahl, “Use of laminar flow patterning for miniaturised biochemical assays” Lab. Chip. 2004, 4, 654–657.

    Article  CAS  Google Scholar 

  38. S. Takayama, E. Ostuni, P. LeDuc., K. Naruse, D. E. Ingber., G. M. Whitesides “Laminar flows: subcellular positioning of small molecules” Nature 2001, 411, 1016.

    Article  CAS  Google Scholar 

  39. M. Schena, D. Shalon, R. W. Davis, P. O. Brown, “Quantitative monitoring of gene expression patterns with a complementary DNA microarray” Science 1995, 270, 467–470.

    Article  CAS  Google Scholar 

  40. R.A. Heller, M. Schena, A. Chai, D. Shalon, T. Bedilion, J. Gilmore, D.E. Woolley, R.W. Davis, “Discovery and analysis of inflammatory disease-related genes using cDNA microarrays” Proc. Natl. Acad. Sci. U.S.A. 1997, 94, 2150–2155.

    Article  CAS  Google Scholar 

  41. D. Shalon, S. J. Smith, P. O. Brown, “A DNA microarray system for analyzing complex DNA samples using two-color fluorescent probe hybridization” Genome Res. 1996, 6, 639–645.

    Article  CAS  Google Scholar 

  42. M.F. Lopez, M.G. Pluskal, “Protein micro- and macroarrays: digitizing the proteome” J. Chromatogr., B 2003, 787, 19–27.

    Article  CAS  Google Scholar 

  43. A. Roda, M. Guardigli, C. Russo, P. Pasini, M. Baraldini, “Protein microdeposition using a conventional ink-jet printer” Biotechniques 2000, 28, 492–496.

    CAS  Google Scholar 

  44. A. Khademhosseini, K. Y. Suh, S. Jon, G. Eng, J. Yeh, G. J. Chen, R. Langer, “A soft lithographic approach to fabricate patterned microfluidic channels” Anal. Chem. 2004, 76, 3675–3681.

    Article  CAS  Google Scholar 

  45. W. Zhan, G. H. Seong, R. M. Crooks, “Hydrogel-based microreactors as a functional component of microfluidic systems” Anal. Chem. 2002, 74, 4647–4652.

    Article  CAS  Google Scholar 

  46. D. J. Beebe, J. S. Moore, J. M. Bauer, Q. Yu, R. H. Liu, C. Devadoss, B. H. Jo, “Functional hydrogel structures for autonomous flow control inside microfluidic channels” Nature 2000, 404, 588–590.

    Article  CAS  Google Scholar 

  47. J. Heo, K. J. Thomas, G. H. Seong, R. M. Crooks, “A microfluidic bioreactor based on hydrogel-entrapped E. coli: cell viability, lysis, and intracellular enzyme reactions” Anal. Chem. 2003, 75, 22–26.

    Article  CAS  Google Scholar 

  48. M. Mrksich, L. E. Dike, J. Tien, D. E. Ingber, G. M. Whitesides, “Using microcontact printing to pattern the attachment of mammalian cells to self-assembled monolayers of alkanethiolates on transparent films of gold and silver” Exp. Cell Res. 1997, 235, 305–313.

    Article  CAS  Google Scholar 

  49. S.W. Rhee, A. M. Taylor, C. H. Tu, D. H. Cribbs, C. W. Cotman, N. L. Jeon, “Patterned cell culture inside microfluidic devices” Lab. Chip 2005, 5, 102–107.

    Article  CAS  Google Scholar 

  50. S.D. Senturia. “Microsystem Design”, Kluwer, Norwell, 2000.

    Google Scholar 

  51. Y.C. Chang, C.W. Frank, “Vapor deposition-polymerization of -amino acid N-carboxy anhydride on the silicon(100) native oxide surface” Langmuir 1998, 14, 326.

    Article  Google Scholar 

  52. N. H. Lee, C. W. Frank, “Surface-initiated vapor polymerization of various -amino acids” Langmuir 2003, 19, 1295.

    Article  CAS  Google Scholar 

  53. Y. Mao, K. K. Gleason, “Hot filament chemical vapor deposition of poly(glycidyl methacrylate) thin films using tert-butyl peroxide as an initiator” Langmuir 2004, 20, 2484.

    Article  CAS  Google Scholar 

  54. T. P. Martin, K. K. Gleason, “Combinatorial initiated CVD for polymeric thin films” Chem. Vap. Dep. 2006, 12, 685.

    Article  CAS  Google Scholar 

  55. W.F. Gorham, “A new, general synthetic method for the preparation of Linear poly-p-xylylenes” J. Polym. Sci., Part A-1 1966, 4, 3027.

    Article  CAS  Google Scholar 

  56. J. Lahann, D. Klee, H. Hocker, “Chemical vapour deposition polymerization of substituted [2.2]paracyclophanes” Macromol. Rapid Commun. 1998, 19, 441.

    Article  CAS  Google Scholar 

  57. J. Lahann, M. Balcells, T. Rodon, J. Lee, I.S. Choi, K.F. Jensen, R. Langer, “Reactive polymer coatings: a platform for patterning proteins and mammalian cells onto a broad range of materials” Langmuir 2002, 18, 3632.

    Article  CAS  Google Scholar 

  58. J. Lahann, R. Langer, “Novel poly(p-xylylenes): thin films with tailored chemical and optical properties” Macromolecules 2002, 35, 4380.

    Google Scholar 

  59. J. Lahann, “Vapor-based polymer coatings for potential biomedical applications” Polym. Inter. 2006, 55, 1361.

    Article  CAS  Google Scholar 

  60. Y. Elkasabi, M. Yoshida, H. Nandivada, H. Y. Chen, J. Lahann, “Towards multipotent coatings: chemical vapor deposition and biofunctionalization of carbonyl-substituted copolymers” Macromol. Rapid Comm. 2008, 29, 855–870.

    Article  CAS  Google Scholar 

  61. M. Morgen, S. H. Rhee, J. H. Zhao, I. Malik, T. Ryan, H. M. Ho, M. A. Plano, P. Ho, “Comparison of crystalline phase transitions in fluorniated vs nonfluorinated parylene thin films” Macromolecules 1999, 32, 7555.

    Article  CAS  Google Scholar 

  62. J. J. Senkevich, S. B. Desu, V. Simkovic, “Temperature studies of optical birefringence and X-ray diffraction with poly(p-xylylene), poly(chloro-p-xylylene) and poly(tetrafluoro-p-xylylene) CVD thin films” Polymer 2000, 41, 2379.

    Article  CAS  Google Scholar 

  63. S. Y. Park, S. N. Chvalun, A. A. Nikolaev, K. A. Mailyan, A. V. Pebalk, I. E. Kardash, “The structure of poly(cyano-p-xylylene)” Polymer 2000, 41, 2937.

    Article  CAS  Google Scholar 

  64. D. Klee, N. Weiss, J. Lahann, “Vapor-based polymerization of functionalized [2.2]paracyclophanes: a unique approach towards surface-engineered microenvironments” Chapter 18, Modern Cyclophane Chemistry, Wiley-VCH, Weinheim, 2004, p463.

    Google Scholar 

  65. H. Nandivada, H. Y. Chen, J. Lahann, “Vapor-based synthesis of poly[(4-formyl-p-xylylene)-co-(p-xylylene)] and its use for biomimetic surface modifications” Macromol. Rapid Comm. 2005, 26, 1794.

    Article  CAS  Google Scholar 

  66. G. T. Hermanson, “Bioconjugate Techniques”, 1st edition, Academic, San Diego, CA, 1996.

    Google Scholar 

  67. D. N. Moothoo, J. H. Naismith, “A general method for co-crystallization of concanavalin A with carbohydrates” Acta Crystallogr. D Biol. Crystallogr. 1999, D55, 1, 353.

    Article  CAS  Google Scholar 

  68. S. Thenevet, H.Y. Chen, J. Lahann, F. Stellacci, “A generic approach towards nanostructured surfaces based on supramolecular nanostamping on reactive polymer coatings” Adv. Mater. 2007, 19, 4333.

    Article  Google Scholar 

  69. H. Nandivada, H. Y. Chen, L. Bondarenko, J. Lahann, “Reactive polymer coatings that ‘click’ ” Angew. Chem. Int. Ed. 2006, 45, 3360.

    Article  CAS  Google Scholar 

  70. V. V. Rostovtsev, L. G. Green, V. V. Fokin, K. B. Sharpless, “A stepwise huisgen cycloaddition process: copper(I)-catalyzed regioselective “ligation” of azides and terminal alkynes” Angew. Chem. 2002, 114, 2708–2711; Angew. Chem. Int. Ed. 2002, 41, 2596–2599.

    Google Scholar 

  71. H.Y. Chen, Y. Elkasabi, J. Lahann, “Surface modification of confined microgeometries via vapor-deposited polymer coatings” J. Am. Chem. Soc. 2006, 128, 374.

    Article  CAS  Google Scholar 

  72. J. C. McDonald, G. M. Whitesides, “Poly(dimethylsiloxane) as a material for fabricating microfluidic devices” Acc. Chem. Res. 2002, 35, 491–499.

    Article  CAS  Google Scholar 

  73. H. W. Gu, R. K. Zheng, X. X. Zhang, B. Xu, “Using Soft lithography to pattern highly oriented polyacetylene (HOPA) films via solventless polymerization” Adv. Mater. 2004, 16, 1356.

    Article  CAS  Google Scholar 

  74. M. Graff, S. K. Mohanty, E. Moss, A. B. Frazier, “Microstenciling: a generic technology for microscale patterning of vapor deposited materials” J. Microelectromech. Syst. 2004, 13, 956.

    Article  CAS  Google Scholar 

  75. H.Y. Chen, J. Lahann, “Vapor-assisted micropatterning in replica structures: a solventless approach towards topologically and chemically designable surfaces” Adv. Mater. 2007, 19, 3801.

    Article  CAS  Google Scholar 

  76. X. Jiang, H. Y. Chen, G. Galvan, M. Yoshida, J. Lahann, “Vapor-based initiator coatings for atom transfer radical polymerization” Adv. Funct. Mater. 2008, 18, 27.

    Article  CAS  Google Scholar 

  77. E. M. Tolstopyatov, “Thickness uniformity of gas-phase coatings in narrow channels: I. Long channels” J. Phys. D Appl. Phys. 2002, 35, 1516.

    Article  CAS  Google Scholar 

  78. E. M. Tolstopyatov, S. H. Yang, M. C. Kim, “Thickness uniformity of gas-phase coatings in narrow channels: II. One-side confined channels” J. Phys. D Appl. Phys. 2002, 35, 2723.

    Article  CAS  Google Scholar 

  79. H. Y. Chen, J. M. Rouillard, E. Gulari, J. Lahann, “Colloids with high-definition surface structures” Proc. Nat. Acad. Sci. 2007, 104, 11173.

    Article  CAS  Google Scholar 

  80. H. Y. Chen, J. M. Rouillard, E. Gulari, J. Lahann, “High-precision surface modification of three-dimensional geometries using photodefinable ultra-thin polymer coatings” PMSE Preprints 2006, 95, 125.

    CAS  Google Scholar 

  81. W. W. Shen, S.G. Boxer, W. Knoll, C.W. Frank, “Polymer-supported lipid bilayers on benzophenone-modified substrates” Biomac­ro­molecules 2001, 2, 70–79.

    Article  CAS  Google Scholar 

  82. K. Y. Suh, R. Langer, J. Lahann, “A novel photodefinable reactive polymer coating and its use for microfabrication of hydrogel elements” Adv. Mater. 2004, 16, 1401.

    Article  CAS  Google Scholar 

  83. H. Y. Chen, J. Lahann, “Fabrication of discontinuous surface patterns within microfluidic channels using photodefinable vapor-based polymer coatings” Anal. Chem. 2005, 77, 6909.

    Article  CAS  Google Scholar 

  84. J. Tian, H Gong, N. Sheng, X. Zhou, E. Gulari, X. Gao, G. Church, “Accurate multiplex gene synthesis from programmable DNA microchips” Nature 2004, 432, 1050.

    Article  CAS  Google Scholar 

  85. J. P. Pellois, X. Zhou, O. Srivannavit, T. Zhou, E. Gulari, X. Gao, “Individually addressable parallel peptide synthesis on microchips” Nat. Biotech. 2002, 20, 922.

    Article  CAS  Google Scholar 

  86. X. L. Gao, X. C. Zhou, E. Gulari, “Light directed massively parallel on-chip synthesis of peptide arrays with t-Boc chemistry” Proteomics 2003, 3, 2135.

    Article  CAS  Google Scholar 

  87. X. Gao, E. LeProust, H. Zhang, O. Srivannavit, E. Gulari, P. Yu, C. Nishiguchi, Q. Xiang, X. Zhou, “A flexible light-directed DNA chip synthesis gated by deprotection using solution photogenerated acids” Nucl. Acids Res. 2001, 29, 4744–4750.

    Article  CAS  Google Scholar 

  88. K. S. Taton, P. E. Guire, “Photoreactive self-assembling polyethers for biomedical coatings” Colloids Surf. B 2002, 24, 123–132.

    Article  CAS  Google Scholar 

  89. K. M. Vaeth, K. F. Jensen, “Selective growth of Poly(p-phenylene vinylene) prepared by chemical vapor deposition” Adv. Mater. 1999, 11, 814.

    Article  CAS  Google Scholar 

  90. K. M. Vaeth, K. F. Jensen, “Transition metals for selective chemical vapor deposition of parylene-based polymers” Chem. Mater. 2000, 12, 1305.

    Article  CAS  Google Scholar 

  91. K. Y. Suh, R. Langer, J. Lahann, “Fabrication of elastomeric stamps with polymer-reinforced sidewalls via chemically selective vapor deposition polymerization of poly(p-xylylene)” App. Phys. Lett. 2003, 83, 4250.

    Article  CAS  Google Scholar 

  92. H. Y. Chen, J. H. Lai, X. Jiang, J. Lahann, “Substrate-selective chemical vapor deposition of reactive polymer coatings” Adv. Mater. 2008, 20, 3474.

    Article  CAS  Google Scholar 

Download references

Author information

Authors and Affiliations

  1. Material Science and Engineering, University of Michigan, Ann Arbor, MI, USA

    Yaseen Elkasabi

  2. University of Michigan, Ann Arbor, MI, USA

    Joerg Lahann

Authors
  1. Yaseen Elkasabi
    View author publications

    You can also search for this author in PubMed Google Scholar

  2. Joerg Lahann
    View author publications

    You can also search for this author in PubMed Google Scholar

Editor information

Editors and Affiliations

  1. , MIT Division of Health Sciences and Tech, Harvard Medical School, Landsdowne St. 65, Cambridge, 02139, Massachusetts, USA

    Ali Khademhosseini

  2. , Department of Mechanical and Aerospace E, Seoul National University, Kwanak-gu, Shinlim-dong 56-1-1, Seoul, 151-742, Korea, Republic of (South Korea)

    Kahp-Yang Suh

  3. Biophage Pharma, Inc., Royalmount Ave. 6100, Montreal, H4P 2R2, Québec, Canada

    Mohammed Zourob

Rights and permissions

Reprints and permissions

Copyright information

© 2011 Springer Science+Business Media, LLC

About this protocol

Cite this protocol

Elkasabi, Y., Lahann, J. (2011). Progress Report on Microstructured Surfaces Based on Chemical Vapor Deposition. In: Khademhosseini, A., Suh, KY., Zourob, M. (eds) Biological Microarrays. Methods in Molecular Biology, vol 671. Humana Press, Totowa, NJ. https://doi.org/10.1007/978-1-59745-551-0_16

Download citation

  • DOI: https://doi.org/10.1007/978-1-59745-551-0_16

  • Published:

  • Publisher Name: Humana Press, Totowa, NJ

  • Print ISBN: 978-1-934115-95-4

  • Online ISBN: 978-1-59745-551-0

  • eBook Packages: Springer Protocols

Publish with us

Policies and ethics

Search

Navigation