High-speed visualization, a powerful diagnostic tool for microactuators – retrospect and prospect P. KrehlS. EngemannE. P. Hofer Pages: 113 - 132
Analytical modeling and optimization for a laterally-driven polysilicon thermal actuator Q.-A. HuangN. K. S. Lee Pages: 133 - 137
Fabrication of nanomechanical optical devices with aligned wafer bonding C. GuiG. J. VeldhuisM. Elwenspoek Pages: 138 - 143
Low-temperature anodic bonding of silicon to silicon wafers by means of intermediate glass layers A. GerlachD. MaasK. Kaschlik Pages: 144 - 149