Microfactories; new applications of micromachine technology to the manufacture of small products N. KawaharaT. SutoT. Ataka Technical papers Pages: 37 - 41
Microstereophotolithography using a liquid crystal display as dynamic mask-generator A. BertschS. ZissiJ. C. André Pages: 42 - 47
Development of a solder bump technique for contacting a three-dimensional multi electrode array T. A. FrieswijkJ. A. BielenP. Bergveld Pages: 48 - 52
An approach to layout and process verification for microsystem physical design K. HahnR. Brück Pages: 53 - 60
Microcoil speed and position sensor for automotive applications Y. de CoulonC. BourgeoisF. Rudolf Pages: 61 - 63
Polydimethylsiloxane, a photocurable rubberelastic polymer used as spring material in micromechanical sensors J. C. LöttersW. OlthuisP. Bergveld Pages: 64 - 67
The measurement of minimotors and micromotors torque-characteristic using miniaturized cable brake W. BrennerG. HaddadN. Delic Pages: 68 - 71
Modelling and simulation of microsystems using hardware description language Z˘. Mrc˘aricaV. B. LitovskiH. Detter Pages: 80 - 85
