Fabrication of LIGA-Acceleration Sensors by Aligned Molding A. BothW. BacherM. Strohrmann Pages: 104 - 108
High aspect ratio structures obtained by electroforming in microstructured glass D. HülsenbergA. HarnischB. Straube Pages: 109 - 113
Fabrication of monolithic integrated fiber-lens connector arrays by deep proton irradiation M. KufnerS. Kufner Pages: 114 - 118
The strategic development of HARM manufacturing technologies S. T. WalshR. BoylanJ. Elders Pages: 119 - 125
Ceramic microstructures and potential applications R. KnitterE. GüntherU. Maciejewski Pages: 135 - 138
The micromilling process for high aspect ratio microstructures C. R. FriedrichM. J. Vasile Pages: 144 - 148
Movable microstructures made by a sub-micron LIGA process M. W. BörnerM. KohlW. K. Schomburg Pages: 149 - 152