CO2-assisted thermal fusion bonding of heterogeneous materials by use of surface nano-pillars Tsung-Fu YaoSen-Yeu Yang Technical Paper Open access 18 January 2013 Pages: 151 - 157
Metal-ceramic-composite casting of complex micro components D. Buqezi-AhmetiJ. MaisenbacherT. Hanemann Technical Paper 18 July 2012 Pages: 159 - 165
Improved micro fluxgate sensor with double-layer Fe-based amorphous core Chong LeiJian LeiYong Zhou Technical Paper 12 May 2012 Pages: 167 - 172
In-plane spectroscopy of microfluidic systems made in photosensitive glass Khalid Hasan TantawiWilliam GaillardJohn D. Williams Technical Paper 24 July 2012 Pages: 173 - 177
Ultra high aspect ratio penetrating metal microelectrodes for biomedical applications Abishek B. KamarajMurali M. SundaramRonnie Mathew Technical Paper 30 August 2012 Pages: 179 - 186
A novel high sensitive MEMS intraocular capacitive pressure sensor Bahram Azizollah GanjiM. Shahiri-Tabarestani Technical Paper 30 October 2012 Pages: 187 - 194
The monolithic integration system of bulk-Si sensors and actuators based on the Au–Au bonding technology Chunhua CaiMing Qin Technical Paper 24 June 2012 Pages: 195 - 201
Silicon isotropic and anisotropic etching for MEMS applications S. NegiR. Bhandari Technical Paper 15 June 2012 Pages: 203 - 210
Micromachined ultrasonic transducers based on lead zirconate titanate (PZT) films Junhong LiChenghao WangMengwei Liu Technical Paper 29 December 2012 Pages: 211 - 218
Electromagnetically force balanced polymer accelerometer Ji LiWerner K. Schomburg Technical Paper 16 June 2012 Pages: 219 - 226
Analysis and design process of a bi-membrane structure for micro-flow regulators Francisco PerdigonesAntonio LuqueJosé M. Quero Technical Paper 28 July 2012 Pages: 227 - 236
A new design of multi-bit RF MEMS distributed phase shifters for phase error reduction Y. J. DuJ. F. BaoJ. W. Jiang Technical Paper 14 August 2012 Pages: 237 - 244
Light-actuated water droplet motions on ZnO nanorods Chien-Wei LiuChen-Pin HsuYu-Lin Wang Technical Paper 16 June 2012 Pages: 245 - 251
Silver (Ag) as a novel masking material in glass etching for microfluidics applications Hing Wah LeeDaniel C. S. BienAun Shih Teh Technical Paper 19 June 2012 Pages: 253 - 259
A micro gearing system based on a ratchet mechanism and electrostatic actuation Phuc Hong PhamDzung Viet Dao Technical Paper 18 July 2012 Pages: 261 - 267
A MEMS-based pyramid micro-needle electrode for long-term EEG measurement Long-Fei WangJing-Quan LiuChun-Sheng Yang Technical Paper 09 August 2012 Pages: 269 - 276
A new inertial piezoelectric rotary actuator based on changing the normal pressure Jianming WenJijie MaZhonghua Zhang Technical Paper 09 December 2012 Pages: 277 - 283
Fabrication of cantilever with self-sharpening nano-silicon-tip for AFM applications Jia-dong LiJie XieDong-min Wu Technical Paper 18 July 2012 Pages: 285 - 290
Experimental study of lubricant depletion in heat assisted magnetic recording: effects of laser heating duration and temperature Yansheng MaXiuying ChenBo Liu Technical Paper 07 September 2012 Pages: 291 - 297