A review of fabrication processes for vertical comb drives Else GallagherWalied MoussaMark McDermott Review Paper 07 January 2012 Pages: 381 - 397
Detailed investigation of capacitive micromachined ultrasonic transducer design space Onursal OnenRasim Guldiken Technical Paper 21 February 2012 Pages: 399 - 408
Development of two step carbon dioxide assisted thermal fusion PMMA bonding process Chia-Lin WuChen-Chung LiSen-Yeu Yang Technical Paper 14 February 2012 Pages: 409 - 414
Quality control for deep x-ray lithography (LIGA): a preliminary metrology study Pascal MeyerJames D. ClaverleyRichard K. Leach Technical Paper 17 February 2012 Pages: 415 - 421
A method of water pretreatment to improve the thermal bonding rate of PMMA microfluidic chip Liqun DuHongling ChangChong Liu Technical Paper 04 March 2012 Pages: 423 - 428
Laser fabrication of micropores and their integration to microfluidic platforms for DNA electrophoresis B. LernerM. S. PerezC. A. Rinaldi Technical Paper 06 January 2012 Pages: 429 - 435
Enhancement of PZT embedded swing arm actuator using integrated read/write performance and actuation Yu-Cheng LinPo-Chien ChouStone Cheng Technical Paper 14 February 2012 Pages: 437 - 442
VM-TEST: Mechanical property measurement using electrostatically actuated vertical MEMS test structures fabricated in thick metal layers Darcy T. HaluzanDavid M. KlymyshynJürgen Mohr Technical Paper 24 December 2011 Pages: 443 - 452
A contact lens with integrated micro solar cells Andrew R. LingleyBrian P. OtisBabak A. Parviz Technical Paper 10 January 2012 Pages: 453 - 458
Replication of precise polymeric microlens arrays combining ultra-precision diamond ball-end milling and micro injection molding S. KirchbergL. ChenO. Riemer Technical Paper 13 January 2012 Pages: 459 - 465
Wafer-level fabrication process for fully encapsulated micro-supercapacitors with high specific energy Hugo DurouDavid PechMagali Brunet Technical Paper 08 January 2012 Pages: 467 - 473
Micro-mirror laser scanner combined with a varifocal mirror R. HokariK. Hane Technical Paper 05 January 2012 Pages: 475 - 480
Rubber-assisted embossing of polymer thin films using molds with through-thickness microchannels Danyang ZhaoTom WyattDonggang Yao Technical Paper 24 January 2012 Pages: 481 - 488
A planar micro-concentrator/injector for low power consumption microchromatographic analysis of benzene and 1,3 butadiene H. LahlouJ.-B. SanchezC. Cané Technical Paper 07 February 2012 Pages: 489 - 495
A new S-shaped MEMS PZT cantilever for energy harvesting from low frequency vibrations below 30 Hz Huicong LiuChengkuo LeeChenggen Quan Technical Paper 24 January 2012 Pages: 497 - 506
Effect of die attachment on key dynamical parameters of micromachined gyroscopes Zhanqiang HouDingbang XiaoXu Zhang Technical Paper 25 February 2012 Pages: 507 - 513
A novel approach for increasing the strength of an Au/Si eutectic bonded interface on an oxidized silicon surface M. HauboldY.-C. LinT. Geßner Technical Paper 07 February 2012 Pages: 515 - 521
Insight into the micro scale dynamics of a micro fluidic wetting-based conveying system by particle based simulation Jan LienemannDennis WeißJan G. Korvink Technical Paper 04 March 2012 Pages: 523 - 530
