Low power integrated fluxgate sensor with a spiral magnetic core Chong LeiLei ChenYong Zhou Technical Paper 12 October 2011 Pages: 1697 - 1702
Roll-to-roll large-format slot die coating of photosensitive resin for UV embossing Z. W. ZhongX. C. ShanS. J. Wong Technical Paper 30 October 2011 Pages: 1703 - 1711
Design and fabrication of a freeform microlens array for uniform beam shaping Likai LiAllen Y. Yi Technical Paper 12 October 2011 Pages: 1713 - 1720
Development of a flexible three-axial tactile sensor array for a robotic finger Hyun-Joon KwonJong-Ho KimWoo-Chang Choi Technical Paper 14 October 2011 Pages: 1721 - 1726
Parametric characterization of piezoelectric valveless micropump Parikshit VermaDhiman Chatterjee Technical Paper 12 October 2011 Pages: 1727 - 1737
Effect of residual stress on RF MEMS switch Shankar DuttaMohd ImranR. Chatterjee Technical Paper 13 October 2011 Pages: 1739 - 1745
A scrape-through piezoelectric MEMS energy harvester with frequency broadband and up-conversion behaviors Huicong LiuCho Jui TayChengkuo Lee Technical Paper 14 October 2011 Pages: 1747 - 1754
Structural, morphological and micromechanical studies on fly ash reinforced PMMA composites Arunendra Kumar PatelR. BajpaiA. Saha Technical Paper 01 October 2011 Pages: 1755 - 1762
3D surface topography and reflectivity of anisotropic etched silicon micromirrors for BioMEMS R. E. MackayN. LionisH. R. Le Technical Paper 15 October 2011 Pages: 1763 - 1770
A method to measure the micro-capacitance for MEMS comb actuators Guo ZhansheCao LeFan Shangchun Technical Paper 04 October 2011 Pages: 1771 - 1778
Investigation of the internal stress effects on static and dynamic characteristics of an electrostatically actuated beam for MEMS and NEMS application A. BhushanM. M. InamdarD. N. Pawaskar Technical Paper 21 October 2011 Pages: 1779 - 1789
Effects of processing parameters on the micro-channels replication in microfluidic devices fabricated by micro injection molding G. FuS. B. TorN. H. Loh Technical Paper 15 October 2011 Pages: 1791 - 1798