Volume 10, Issue 1 | Microsystem Technologies

Microsystem Technologies

Micro- and Nanosystems Information Storage and Processing Systems

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Volume 10, Issue 1

December 2003

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13 articles in this issue

Improving the process capability of SU-8
M. Shaw
D. Nawrocki
D. Johnson
OriginalPaper Pages: 1 - 6
Flip chip electrical interconnection by selective electroplating and bonding
L.-W. Pan
P. Yuen
E. J. Garcia
OriginalPaper Pages: 7 - 10
Minimization of tape transient disturbances in track following tape drives with a disturbance observer
S. P. Panda
A. P. Engelmann
OriginalPaper Pages: 11 - 16
Electrostatically driven film light modulators for display applications
M. Pizzi
V. Koniachkine
P. Perlo
OriginalPaper Pages: 17 - 21
Microfabrication of massive parallel micromirror-lenses by X-ray LIGA technique: recent advances and prospects
R. Kupka
F. Bouamrane
S. Megtert
OriginalPaper Pages: 22 - 28
Sidewall roughness control in advanced silicon etch process
H.-C. Liu
Y.-H. Lin
W. Hsu
OriginalPaper Pages: 29 - 34
Fast sliding-mode seek control of hard disk servos
J. Zhou
Y. Wang
OriginalPaper Pages: 35 - 41
Writing-induced heating and its effects on air bearing performance
Y. F. Han
B. Liu
C. P. Tso
OriginalPaper Pages: 42 - 46
Development of optical gap sensor application to near field recording
Y.-J. Yoon
H.-D. Kwon
N.-C. Park
OriginalPaper Pages: 47 - 52
Control and operation of reel-to-reel tape drives without tension transducer
S. P. Panda
A. P. Engelmann
OriginalPaper Pages: 53 - 59
Modeling, control, and operation of threader mechanism in tape drives
S. P. Panda
D. J. Laverenz
OriginalPaper Pages: 60 - 65
Advanced optical and magneto-optical recording techniques: a review
D. Jenkins
W. Clegg
P. Nutter
OriginalPaper Pages: 66 - 75
Gas pressurized hot embossing for transcription of micro-features
J.-H. Chang
S.-Y. Yang
OriginalPaper Pages: 76 - 80