Microfabrication by hot embossing and injection molding at LASTI H. MekaruT. YamadaT. Hattori OriginalPaper Pages: 682 - 688
Metallic microgripper with SU-8 adaptor as end-effectors for heterogeneous micro/nano assembly applications K. KimE. NilsenJ.-B. Lee OriginalPaper Pages: 689 - 693
Using megasonic development of SU-8 to yield ultra-high aspect ratio microstructures with UV lithography J. D. WilliamsW. Wang OriginalPaper Pages: 694 - 698
Microfabrication of an electromagnetic power relay using SU-8 based UV-LIGA technology J. D. WilliamsW. Wang OriginalPaper Pages: 699 - 705
Incorporating design rules into the LIGA technology applied to a fourier transformation spectrometer C. SolfA. JanssenU. Wallrabe OriginalPaper Pages: 706 - 710
Hybrid replication development for construction of polymeric devices C. Khan MalekG. ThuillierP. Blind OriginalPaper Pages: 711 - 715
Fabrication and preliminary testing of X-ray lenses in thick SU-8 resist layers V. NazmovE. ReznikovaV. Saile OriginalPaper Pages: 716 - 721
Preliminary results of fracture mechanics analysis on the quality of LIGA sidewalls M. S. GuimarĂ£esP. MeyerJ. Schulz OriginalPaper Pages: 722 - 727
Improvements in graphite-based X-ray mask fabrication for ultradeep X-ray lithography R. DivanD.C. ManciniD. Van der Weide OriginalPaper Pages: 728 - 734