Micro- and integrated optical devices in glasses and polymers for hybride integration into microsystems W. KartheR. GöringT. Poßner Technical Papers Pages: 59 - 67
Micromachined infrared pneumatic detector for gas sensor J. -B. ChévrierK. BaertA. Verbist Technical Papers Pages: 71 - 74
Biosensors for analytical microsystems U. WollenbergerR. HintscheF. scheller Technical Papers Pages: 75 - 83
A system to measure 3-directional relative displacements for a biomedical application V. L. SpieringV. GassE. Morscher Technical Papers Pages: 88 - 92
3D optimization of average torque of electrostatic micromotors T. B. JohanssonK. HameyerR. Belmans Technical Papers Pages: 98 - 103