Alternative resist adhesion and electroplating layers for LIGA process A. El-KholiK. BadeX.-M. Tang Pages: 161 - 164
Fabrication of microstructure using fluorinated polyimide and silicone-based positive photoresist T. ItoR. SawadaT. Kiyokura Pages: 165 - 168
Metal oxide gas sensor for high temperature application T. GessnerK. GottfriedM. Vogel Pages: 169 - 174
High-aspect-ratio WC-Co microstructure produced by the combination of LIGA and micro-EDM K. TakahataN. ShibaikeH. Guckel Pages: 175 - 178
Dimensional measurement of high aspect ratio micro structures with a resonating micro cantilever probe M. YamamotoH. TakeuchiS. Aoki Pages: 179 - 183
High aspect ratio micromachining (HARM) technologies for microinertial devices M. McNieD. KingK. W. Lee Pages: 184 - 188
Chemically inert membrane separator fabricated with the AMANDA-process Z. RummlerW. BacherW. K. Schomburg Pages: 189 - 191
Net shape ceramic microcomponents by modified sol–gel casting C. M. ChanG. Z. CaoT. G. Stoebe Pages: 200 - 204