Fabrication of collimating grids for an x-ray solar telescope using LIGA methods R. A. BrennenM. H. HechtC. K. Malek Pages: 91 - 96
Step by step development of an electrochemical microanalytical system W. SüßH. EggertR. Rapp Pages: 97 - 101
Novel fast atom beam (FAB) processes for fabricating functional nanostructures on three-dimensional microstructures M. HatakeyamaS. TanakaY. Hatamura Pages: 112 - 116
Fusion bonding of rough surfaces with polishing technique for silicon micromachining C. GuiH. AlbersP. V. Lambeck Pages: 122 - 128
Injection molding and related techniques for fabrication of microstructures V. PiotterT. HanemannJ. Haußelt Pages: 129 - 133
Characterisation of silicon carbide JFETs with respect to microsystems for high temperature applications S. ZappeM. LeoneE. Obermeier Pages: 134 - 138
InP-based micromachined Mach-Zehnder interferometer stress sensors C. SeassalJ. L. LeclercqF. Sidoroff Pages: 139 - 144