Volume 22, Issue 7

Search all Microsystem Technologies articles

July 2016

SPIE Microtechnologies 2015

Issue Editors:

Ulrich Schmid,
Jose Luis Sanchez-Rojas,
Sander van den Driesche,
Riccardo Brama,
Bernd Michel

43 articles in this issue

Special Issue of the Conferences ‘Smart Sensors, Actuators and MEMS’, ‘Cyber-Physical Systems’ and ‘Bio-MEMS and Medical Microdevices’ within the SPIE EUROPE ‘MICROTECHNOLOGIES’ Symposium Barcelona, Spain, 4–6 May 2015
Ulrich Schmid
Jose Luis Sanchez-Rojas
Bernd Michel
Editorial 25 May 2016 Pages: 1511 - 1512
Human blood microfluidic test chip for imaging, label-free biosensor
S. Jahns
S. B. Gutekunst
M. Gerken
Technical Paper 14 December 2015 Pages: 1513 - 1518
A remotely powered fully integrated low power class-E power amplifier for implantable sensor systems
Kerim Ture
Enver G. Kilinc
Catherine Dehollain
Technical Paper 12 December 2015 Pages: 1519 - 1527
Miniaturized devices for isothermal DNA amplification addressing DNA diagnostics
G. D. Kaprou
G. Papadakis
A. Tserepi
Technical Paper 21 December 2015 Pages: 1529 - 1534
A study of kinetic energy harvesting for biomedical application in the head area
Jan Smilek
Zdenek Hadas
Technical Paper 30 December 2015 Pages: 1535 - 1547
Medical apps in need of optical microspectrometers
Reinoud F. Wolffenbuttel
Tanya M. Wolffenbuttel Hosli
Technical Paper Open access 30 January 2016 Pages: 1549 - 1555
Harvesting of river flow energy for wireless sensor network technology
Ervin Kamenar
Saša Zelenika
Vladimir Glažar
Technical Paper 31 December 2015 Pages: 1557 - 1574
FBAR-on-diaphragm type electro-acoustic resonant micro-accelerometer: a theoretical study
Yang Gao
Wan-jing He
Zhen-hua Huang
Technical Paper 06 January 2016 Pages: 1575 - 1583
An accelerated thermal cycling test for RF-MEMS switches
V. Mulloni
G. Sordo
B. Margesin
Technical Paper 02 January 2016 Pages: 1585 - 1592
SAW based phononic crystal sensor, technological challenges and solutions
Marc-Peter Schmidt
Aleksandr Oseev
Soeren Hirsch
Technical Paper 14 January 2016 Pages: 1593 - 1599
2-Level error (drift) compensation for low-cost MEMS-based inertial measurement unit (IMU)
Agusmian Partogi Ompusunggu
Abdellatif Bey-Temsamani
Technical Paper 31 December 2015 Pages: 1601 - 1612
Magnetron sputtering of piezoelectric AlN and AlScN thin films and their use in energy harvesting applications
Stephan Barth
Hagen Bartzsch
Gerald Gerlach
Technical Paper 09 January 2016 Pages: 1613 - 1617
Wind turbines lubricant gearbox degradation detection by means of a lossy mode resonance based optical fiber refractometer
P. Sanchez
D. Mendizabal
F. J. Arregui
Technical Paper 28 December 2015 Pages: 1619 - 1625
Magnetic microstructure analysis of sputter deposited permalloy thin films on a spin-on polyimide substrate
Johannes Rittinger
Piriya Taptimthong
Lutz Rissing
Technical Paper 09 January 2016 Pages: 1627 - 1632
Single-mode—multimode—single-mode and lossy mode resonance-based devices: a comparative study for sensing applications
Abian Bentor Socorro
Miguel Hernaez
Ignacio Raul Matias
Technical Paper 31 December 2015 Pages: 1633 - 1638
Up-scaled macro-device implementation of a MEMS wideband vibration piezoelectric energy harvester design concept
J. Iannacci
G. Sordo
Technical Paper 29 December 2015 Pages: 1639 - 1651
Transforming car glass into microphones using piezoelectric transducers
Christian Bolzmacher
Valentin Le Guelvouit
Technical Paper 05 January 2016 Pages: 1653 - 1663
Study on TSV isolation liners for a Via Last approach with the use in 3D-WLP for MEMS
Lutz Hofmann
Tobias Fischer
Thomas Geßner
Technical Paper 29 December 2015 Pages: 1665 - 1677
Properties of Sc_xAl_1-xN (x = 0.27) thin films on sapphire and silicon substrates upon high temperature loading
P. M. Mayrhofer
P. O. Å. Persson
U. Schmid
Technical Paper 30 December 2015 Pages: 1679 - 1689
Impact of the substrate dependent polarity distribution in c-axis oriented AlN thin films on the etching behaviour and the piezoelectric properties
E. Wistrela
M. Schneider
U. Schmid
Technical Paper 31 December 2015 Pages: 1691 - 1700
In-liquid characterization of in-plane and high order out-of-plane modes of AlN-based square microplates
V. Ruiz-Díez
J. Hernando-García
J. L. Sánchez-Rojas
Technical Paper 30 December 2015 Pages: 1701 - 1708
The charge push-through electronics design for fully implantable artificial cochlea powered by energy harvesting technologies
Jaromir Zak
Zdenek Hadas
Jaromir Hubalek
Technical Paper 13 January 2016 Pages: 1709 - 1719
Path of microparticles in a microfluidic device employing dielectrophoresis for hyperlayer field-flow fractionation
Bobby Mathew
Anas Alazzam
Bashar El-Khasawneh
Technical Paper 13 January 2016 Pages: 1721 - 1732
Design of piezoelectric microtransducers based on the topology optimization method
David Ruiz
Alberto Donoso
José Luis Sánchez-Rojas
Technical Paper 23 January 2016 Pages: 1733 - 1740
Influence of design and fabrication on RF performance of capacitive RF MEMS switches
Anna Persano
Fabio Quaranta
Pietro Siciliano
Technical Paper 23 January 2016 Pages: 1741 - 1746
Optical microsystem design and fabrication for medical image magnification
C. G. Costa
J. M. Gomes
J. H. Correia
Technical Paper 20 January 2016 Pages: 1747 - 1755
Multifunctional thin film sensor system as monitoring system in production
Saskia Biehl
Christian Rumposch
Dirk Landgrebe
Technical Paper 09 February 2016 Pages: 1757 - 1765
Analysis and efficiency measurement of electromagnetic vibration energy harvesting system
Zdenek Hadas
Vojtech Vetiska
Jiri Krejsa
Technical Paper 18 January 2016 Pages: 1767 - 1779
Comparison of in-plane and out-of-plane piezoelectric microresonators for real-time monitoring of engine oil contamination with diesel
J. Toledo
T. Manzaneque
J. L. Sánchez-Rojas
Technical Paper 20 January 2016 Pages: 1781 - 1790
Dependence of time reversal of acoustic waves in plates on mean frequency and plate’s characteristics
Harald Zophoniasson
Charles Hudin
Moustapha Hafez
Technical Paper 19 January 2016 Pages: 1791 - 1798
Optoelectronic sensor for measuring ethanol content during grape must fermentation using NIR spectroscopy
F. Jiménez-Márquez
J. Vázquez
J. L. Sánchez-Rojas
Technical Paper 18 January 2016 Pages: 1799 - 1809
Optimization method for designing multimodal piezoelectric MEMS energy harvesters
G. Sordo
E. Serra
J. Iannacci
Technical Paper 08 February 2016 Pages: 1811 - 1820
Optical fiber resonance-based pH sensors using gold nanoparticles into polymeric layer-by-layer coatings
Pedro Jose Rivero
Javier Goicoechea
Francisco Javier Arregui
Technical Paper 06 February 2016 Pages: 1821 - 1829
Microstructures replication using high frequency excitation
Rokas Šakalys
Giedrius Janušas
Amer Sodah
Technical Paper 19 February 2016 Pages: 1831 - 1843
Design of a low cost and high performance wireless sensor network for structural health monitoring
Marco Giammarini
Daniela Isidori
Enrico Concettoni
Technical Paper 09 February 2016 Pages: 1845 - 1853
MEMS based metal oxide sensor for simultaneous measurement of gas induced changes of the heating power and the sensing resistance
B. Bierer
J. Kneer
S. Palzer
Technical Paper 04 February 2016 Pages: 1855 - 1863
The MEMS four-leaf clover wideband vibration energy harvesting device: design concept and experimental verification
J. Iannacci
G. Sordo
U. Schmid
Technical Paper 29 February 2016 Pages: 1865 - 1881
Manufacturing of membranes by laser ablation in SiC, sapphire, glass and ceramic for GaN/ferroelectric thin film MEMS and pressure sensors
J. Zehetner
S. Kraus
T. Lalinsky
Technical Paper Open access 26 March 2016 Pages: 1883 - 1892
mm-wave integrated wireless transceiver: enabling technology for high bandwidth short-range networking in cyber physical systems
Sergio Saponara
Bruno Neri
Technical Paper 09 March 2016 Pages: 1893 - 1903
Scaling and super-cooling in heat storage harvesting devices
M. E. Kiziroglou
A. Elefsiniotis
E. M. Yeatman
Technical Paper 05 March 2016 Pages: 1905 - 1914
Non-invasive voltage measurement in a three-phase autonomous meter
Davide Brunelli
Clemente Villani
Luca Benini
Technical Paper 12 April 2016 Pages: 1915 - 1926
An easy fabrication process of fully-sealed parylene microfluidic channels with a single deposition step
João Vitor Pimentel
Elena Tolstosheeva
Michael J. Vellekoop
Technical Paper 26 March 2016 Pages: 1927 - 1932
Embedded system for supervision analysis and control of photovoltaic power plants
A. Cabitto
P. Lambruschini
M. Raggio
Technical Paper 22 April 2016 Pages: 1933 - 1942

Volume 22, Issue 7

Search

Navigation