Volume 22, Issue 3

Search all Microsystem Technologies articles

March 2016

Special issue on design, test, integration and packaging of MEMS/MOEMS: DTIP, Cannes, 2014

Issue Editors:

Souhil Megherbi,
Bernd Michel

27 articles in this issue

Special issue on design, test, integration and packaging of MEMS/MOEMS: DTIP, Cannes, 2014
Souhil Megherbi
Bernd Michel
Editorial 14 November 2015 Pages: 449 - 449
Meter-scale large-area capacitive pressure sensors with fabric with stripe electrodes of conductive polymer-coated fibers
Seiichi Takamatsu
Takahiro Yamashita
Toshihiro Itoh
Technical Paper 26 March 2015 Pages: 451 - 457
A dual-axis MEMS capacitive inertial sensor with high-density proof mass
Daisuke Yamane
Takaaki Matsushima
Katsuyuki Machida
Technical Paper 26 April 2015 Pages: 459 - 464
Capacitive flexible pressure sensor: microfabrication process and experimental characterization
T. H. N. Dinh
E. Martincic
P.-Y. Joubert
Technical Paper 26 April 2015 Pages: 465 - 471
Phononic band engineering for thermal conduction control and similarity with photonic band engineering
Masahiro Nomura
Technical Paper 14 May 2015 Pages: 473 - 480
Reliability characterization of a soot particle sensor in terms of stress- and electromigration in thin-film platinum
Radoslav Rusanov
Holger Rank
Oliver Kraft
Technical Paper 05 June 2015 Pages: 481 - 493
Reliable response of RF MEMS LTCC packaged switches after mechanical and thermal stress
A. Lucibello
G. Capoccia
G. Bartolucci
Technical Paper 23 May 2015 Pages: 495 - 501
Simulation and characterization of dynamic contact in a MEMS passive vibration threshold sensor
Zhuoqing Yang
Wenguo Chen
Xiaolin Zhao
Technical Paper 26 May 2015 Pages: 503 - 513
Micro-mixer device with deep channels in silicon using modified RIE process: fabrication, packaging and characterization
Saakshi Dhanekar
Sudhir Chandra
R. Balasubramaniam
Technical Paper 24 May 2015 Pages: 515 - 522
Simulation of a high-power LED lamp for the evaluation and design of heat dissipation mechanisms
De-Shau Huang
Yi-Sheng Liao
Ming-Tzer Lin
Technical Paper 04 June 2015 Pages: 523 - 529
The robustness of an algorithm applied in wafer-level material property extraction
Wan-Chun Chuang
Technical Paper 03 June 2015 Pages: 531 - 536
Design, optimization and simulation of a low-voltage shunt capacitive RF-MEMS switch
Li-Ya Ma
Anis Nurashikin Nordin
Norhayati Soin
Technical Paper 16 June 2015 Pages: 537 - 549
Characterization of strain microgauges for the monitoring of the deformations of a medical needle during its insertion in human tissues
Agnès Bonvilain
Mathilde Gangneron
Technical Paper 12 June 2015 Pages: 551 - 556
Robust design optimization of electro-thermal microactuator using probabilistic methods
B. Khayatzadeh Safaie
M. Shamshirsaz
M. Bahrami
Technical Paper 02 July 2015 Pages: 557 - 568
Investigating fracture strength of poly-silicon membranes using microscopic loading tests and numerical simulation
John Brueckner
Alfons Dehé
Sven Rzepka
Technical Paper 19 June 2015 Pages: 569 - 575
Development of thin film based flexible current clamp sensor using screen-printed coil
Takahiro Yamashita
Yi Zhang
Ryutaro Maeda
Technical Paper 25 July 2015 Pages: 577 - 581
Fabrication, simulations, and measurements of self-assembled millimeter-wave antennas for system-on-chip applications
Sae-Won Lee
Ying Chen
Meenakshinathan Parameswaran
Technical Paper 03 July 2015 Pages: 583 - 592
Characterization of capacitive micromachined ultrasonic transducers
Fayçal Bellared
Joseph Lardiès
Marc Berthillier
Technical Paper 14 July 2015 Pages: 593 - 601
Microwave atomic force microscope: MG63 osteoblast-like cells analysis on nanometer scale
Lan Zhang
Yuanhui Song
Yang Ju
Technical Paper 15 July 2015 Pages: 603 - 608
Fabrication and micromechanical characterization of polycrystalline diamond microcantilevers
Maira Possas
Lionel Rousseau
Philippe Bergonzo
Technical Paper 23 July 2015 Pages: 609 - 615
Bulk metallic glass mold for high volume fabrication of micro optics
Peng He
Likai Li
Allen Y. Yi
Technical Paper 18 December 2014 Pages: 617 - 623
Using MEMS-based inertial sensor with ankle foot orthosis for telerehabilitation and its clinical evaluation in brain injuries and total knee replacement patients
Shao-Li Han
Meng-Jie Xie
Chia-Wen Tsao
Technical Paper 03 February 2015 Pages: 625 - 634
Screen-pad printing for electrode patterning on curvy surfaces
Ken-ichi Nomura
Yasuyuki Kusaka
Hiroaki Ikedo
Technical Paper 18 December 2014 Pages: 635 - 638
Low temperature wafer level conformal polymer dielectric spray coating for through silicon vias with 2:1 aspect ratio
Yuechen Zhuang
Daquan Yu
Zhongcai Niu
Technical Paper 24 December 2014 Pages: 639 - 643
Human breast cancer cell enrichment by Dean flow driven microfluidic channels
M. Zuvin
N. Mansur
A. Sayı Yazgan
Technical Paper 31 January 2015 Pages: 645 - 652
Modeling and test result of closed-loop MEMS accelerometer with wide dynamic range
Feng Zhang
Xiangliang Jin
Longsheng Wang
Technical Paper 15 January 2015 Pages: 653 - 657
Capacitive solvent sensing with interdigitated microelectrodes
Ismail Bilican
Mustafa Tahsin Guler
Sedat Agan
Technical Paper 11 July 2015 Pages: 659 - 668

Volume 22, Issue 3

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