1. International Conference on High Aspect-Ratio Microstructure Technology HARMST '95

   • P. Bley
   • W. Menz
   • H. O. Moser

   Editorial Pages: 39 - 39

2. Fabrication of stepped microoptical benches for fibre and free space applications

   • A. Müller
   • J. Göttert
   • A. Rogner

   Technical Papers Pages: 40 - 45

3. The copolymer of methyl methacrylate and methacrylic acid as a sensitive resist for deep-etch X-ray lithography

   • T. Numazawa
   • Y. Hirata
   • H. Takada

   Technical Papers Pages: 46 - 49

4. The effect of residual solvent on the profiles of thick positive DNO-photoresist for Microsystem Technologies

   • J. Schulz
   • T. Mono
   • J. Mohr

   Technical Papers Pages: 50 - 55

5. Synchrotron radiation analysis of microstructures

   • N. Mölders
   • H. O. Moser
   • V. Saile

   Technical Papers Pages: 56 - 62

6. Tribological investigations of LIGA-microstructures

   • T. Bieger
   • U. Wallrabe

   Technical Papers Pages: 63 - 70

7. Studies of the adhesion properties of LIGA microstructures by X-ray spectroscopy and mechanical measurements

   • D. Kadereit
   • J. Hormes
   • A. El-Kholi

   Technical Papers Pages: 71 - 74

8. Dimensional measurement of micro mechanical components with HAR

   • U. Breitmeier
   • G. Häusler

   Technical Papers Pages: 75 - 78

9. A source of kolovolt X-ray

   • F. Villa
   • A. Luccio
   • M. Zolotorev

   Technical Papers Pages: 79 - 82

10. Light opitcal deformation measurements in microbars with nanometer resolution

    • E. Mazza
    • G. Danuser
    • J. Dual

    Technical Papers Pages: 83 - 91

11. Determination of Young's modulus and residual stress of electroless nickel using test structures fabricated in a new surface micromachining process

    • S. Roy
    • S. Furukawa
    • M. Mehregany

    Technical Papers Pages: 92 - 96

12. Stereolithography and microtechniques

    • S. Zissi
    • A. Bertsch
    • J. C. André

    Technical Papers Pages: 97 - 102

13. A source of kilovolt X-ray

    • F. Villa
    • A. Luccio
    • M. Zolotorev

    Pages: 79 - 82

14. Light optical deformation measurements in microbars with nanometer resolution

    • E. Mazza
    • G. Danuser
    • J. Dual

    Pages: 83 - 91