1. Design and modeling of a new robust multi-mass coupled-resonator family with dynamic motion amplification

   • M. A. Erismis

   Technical Paper 29 November 2012 Pages: 1105 - 1110

   

2. A flexible polyimide cable for implantable neural probe arrays

   • Ming-Yuan Cheng
   • Woo-Tae Park
   • Minkyu Je

   Technical Paper 05 December 2012 Pages: 1111 - 1118

   

3. Low temperature transient liquid phase bonding of Au/Sn and Cu/Sn electroplated material systems for MEMS wafer-level packaging

   • S. Marauska
   • M. Claus
   • B. Wagner

   Technical Paper 21 December 2012 Pages: 1119 - 1130

   

4. Electrical performance analysis and characterization of two port piezoelectric resonators

   • H. C. Qiu
   • P. Schwarz
   • H. Seidel

   Technical Paper 18 December 2012 Pages: 1131 - 1136

   

5. Effects of package on the performance of MEMS piezoresistive accelerometers

   • Ping Li
   • Shiqiao Gao
   • Yunbo Shi

   Technical Paper 18 December 2012 Pages: 1137 - 1144

   

6. Continuously tunable terahertz metamaterial employing a thermal actuator

   • Xiuhan Li
   • Tianyang Yang
   • Xiaoguang Li

   Technical Paper 19 December 2012 Pages: 1145 - 1151

   

7. Design and simulation of a high-performance Z-axis SOI-MEMS accelerometer

   • Abdelhameed Sharaf
   • Sherif Sedky

   Technical Paper 21 December 2012 Pages: 1153 - 1163

   

8. Fabrication of an hermetically packaged silicon resonator on LTCC substrate

   • Nguyen Van Toan
   • Hidetoshi Miyashita
   • Takahito Ono

   Technical Paper 23 December 2012 Pages: 1165 - 1175

   

9. Development and discussion of asymmetric magnetic soft mode electromagnetic imprinting process technology

   • Yung-Chun Weng
   • Yung-Jin Weng
   • Sen-Yeu Yang

   Technical Paper 20 December 2012 Pages: 1177 - 1184

   

10. Fabrication of microstructures on different materials by diode-pumped solid state laser writing for microfluidics applications

    • Qiuling Chen
    • Gabriele Maccioni
    • Luciano Scaltrito

    Technical Paper 23 December 2012 Pages: 1185 - 1194

    

11. Challenges in fabrication and testing of piezoelectric MEMS with a particular focus on energy harvesters

    • Mehdi Rezaei
    • Jonathan Lueke
    • Walied Moussa

    Technical Paper 01 January 2013 Pages: 1195 - 1219

    

12. Hydrogen sensing characteristics of vertical type hydrogen sensors based on porous 3C-SiC with catalyst materials

    • K.-S. Kim
    • G.-S. Chung
    • Fahrettin Yakuphanoglu

    Technical Paper 29 December 2012 Pages: 1221 - 1227

    

13. Experimental research on resist filling behavior in microimprint lithography by using defocusing digital particle image velocimetry

    • Du Jun
    • Wei Zhengying
    • Tang Yiping

    Technical Paper 01 January 2013 Pages: 1229 - 1238

    

14. Analytical modeling and simulation of a 2-DOF drive and 1-DOF sense gyro-accelerometer

    • Payal Verma
    • R. Gopal
    • Sandeep K. Arya

    Technical Paper 08 January 2013 Pages: 1239 - 1248

    

15. A MEMS sandwich differential capacitive silicon-on-insulator accelerometer

    • Yangxi Zhang
    • Gang Yang
    • Yilong Hao

    Technical Paper 08 January 2013 Pages: 1249 - 1254

    

16. Surface acoustic wave based sensors employing ionic liquid for hydrogen sulfide gas detection

    • Yoshinobu Murakawa
    • Motoaki Hara
    • Hiroki Kuwano

    Technical Paper 10 January 2013 Pages: 1255 - 1259

    

17. Anti-smudge screening apparatus for electronic touch screens

    • Bharat Bhushan
    • Palanikkumaran Muthiah

    Technical Paper 16 June 2013 Pages: 1261 - 1263