1. Bi₂Te₃-Sb₂Te₃ on polymeric substrate for X-ray detectors based on the seebeck effect

   • J. G. Rocha
   • L. M. Goncalves
   • S. Lanceros-Mendez

   Technical Paper 23 November 2011 Pages: 1 - 8

   

2. Design, fabrication and testing of a high performance silicon piezoresistive Z-axis accelerometer with proof mass-edge-aligned-flexures

   • A. Ravi Sankar
   • J. Grace Jency
   • S. Das

   Technical Paper 03 December 2011 Pages: 9 - 23

   

3. A high Q micromachined single crystal silicon bulk mode resonator with pre-etched cavity

   • Guoqiang Wu
   • Dehui Xu
   • Yuelin Wang

   Technical Paper 16 November 2011 Pages: 25 - 30

   

4. Capacitive humidity sensors based on a newly designed interdigitated electrode structure

   • Ji-Hong Kim
   • Byung-Moo Moon
   • Sung-Min Hong

   Technical Paper 09 December 2011 Pages: 31 - 35

   

5. Hollow metallic microneedles fabricated by combining bulk silicon micromachining and UV–LIGA technology

   • Xiao-Xiao Yan
   • Jing-Quan Liu
   • Chun-Sheng Yang

   Technical Paper 27 November 2011 Pages: 37 - 42

   

6. Experimental study of the flow-structure interactions in an air- or helium-filled hard disk drive geometry

   • S. W. Kil
   • J. A. C. Humphrey
   • H. Haj-Hariri

   Technical Paper 23 November 2011 Pages: 43 - 56

   

7. Numerical study of the flow-structure interactions in an air- or helium-filled simulated hard disk drive

   • Sae Woong Kil
   • Joseph A. C. Humphrey
   • Hossein Haj-Hariri

   Technical Paper 19 November 2011 Pages: 57 - 75

   

8. A lateral RF MEMS capacitive switch utilizing parylene as dielectric

   • Xunjun He
   • Bo Liu
   • Zhihong Li

   Technical Paper 17 November 2011 Pages: 77 - 85

   

9. Numerical investigation on a laser based localised joining with a glass frit intermediate layer

   • Qiang Wu
   • Yuliya Semenova
   • Gerald Farrell

   Technical Paper 03 December 2011 Pages: 87 - 95

   

10. Effects of electrophoresis and electroosmotic flow on ion enrichment in micro-nanofluidic preconcentrator

    • Jun-yao Wang
    • Zheng Xu
    • Wen-dong Yang

    Technical Paper 08 December 2011 Pages: 97 - 102

    

11. Laser micro-welding of aluminum and copper with and without tin foil alloy

    • Mohammad M. Hailat
    • Ahsan Mian
    • Hans J. Herfurth

    Technical Paper 26 November 2011 Pages: 103 - 112

    

12. Study of residual stress-induced deformation of multilayer cantilever for maskless microplasma etching

    • Li Wen
    • Zhen Yuan
    • Jiaru Chu

    Technical Paper 13 December 2011 Pages: 113 - 118

    

13. Wafer-level multilayer integration of RF passives with thick BCB/metal interlayer connection in silicon-based SiP

    • Jiajie Tang
    • Xiaoyun Ding
    • Le Luo

    Technical Paper 16 November 2011 Pages: 119 - 126

    

14. The design and micromachining of an electromagnetic MEMS flapping-wing micro air vehicle

    • Kun Meng
    • Weiping Zhang
    • Jinge Chen

    Technical Paper 10 December 2011 Pages: 127 - 136

    

15. Device level studies of adaptive optics sliding components in microprojectors

    • James Hunt
    • Bharat Bhushan

    Technical Paper 13 December 2011 Pages: 137 - 148