Design of near-field recording optics using truncated hemispherical SIL with cover-layer incident dual recording layers Wan-Chin KimHyun ChoiJin-Eui Lee Technical Paper 12 September 2006 Pages: 1 - 10
Fabrication and characterization of DRIE-micromachined electrostatic microactuators for hard disk drives Bangtao ChenJianmin MiaoFrancis E. H. Tay Technical Paper 26 August 2006 Pages: 11 - 19
Topology optimization of a swing arm type actuator using the response surface method Jeonghoon YooChoong-Yong Lee Technical Paper 06 September 2006 Pages: 21 - 31
Thermal and flow analysis of a magneto-hydrodynamic micropump Hamzeh DuwairiMustafa Abdullah Technical Paper 12 September 2006 Pages: 33 - 39
Variable optical attenuator using planar light attenuation scheme based on rotational and translational misalignment Chengkuo Lee Technical Paper 12 October 2006 Pages: 41 - 48
Influences of interface oxidation on transmission laser bonding of wafers for microsystem packaging Ampere A. TsengJong-Seung ParkT. P. Chen Technical Paper 07 September 2006 Pages: 49 - 59
Analysis of the dynamic behaviour of a torsional micro-mirror Dong-Ming SunWei DongMichael Kraft Technical Paper 20 September 2006 Pages: 61 - 70
Surface characterization and friction of a bio-inspired reversible adhesive tape Bharat BhushanRobert A. Sayer Technical Paper 14 September 2006 Pages: 71 - 78
Surface micromachined high-performance RF MEMS inductors Dong-Ming FangYong ZhouXiao-Lin Zhao Technical Paper 06 October 2006 Pages: 79 - 83
Manufacturing costs for microsystems/MEMS using high aspect ratio microfabrication techniques R. A. Lawes Technical Paper 22 September 2006 Pages: 85 - 95
Power consumption analysis of surface acoustic wave sensor systems using ANSYS and PSPICE Yi LiuTianhong Cui Technical Paper 20 September 2006 Pages: 97 - 101
Geometrical integrity of micromold cavity sputtered by FIB using multilayer slicing approach Mohammad Yeakub AliYee Wei Loo Technical Paper 12 September 2006 Pages: 103 - 107
Thermal trajectory control for micro RT-PCR biochips Nan-Chyuan TsaiChung-Yang Sue Technical Paper 26 September 2006 Pages: 109 - 115
2D- and 3D-transmission electron microscopy and optical microscopy in powder-based micro components Johannes BöhmMartin BeckJürgen Hausselt Technical Paper 20 September 2006 Pages: 117 - 125