Volume 983, Issue 1

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December 2006

Symposium LL — Focused Ion Beams for Analysis and Processing

Issue Editors:

W. MoberlyChan,
H. Colijn,
R. Langford,
A. Marshall

16 articles in this issue

Residual Stress of Focused Ion Beam-Exposed Polycrystalline Silicon
Kim M. Archuleta
David P. Adams
Julia E. Fulghum
Article 24 January 2007 Article: 810
Development of Hybrid MEMS/FIB Processes and Applications of Three-Pronged Active Nanotweezers For Manipulation of Nano Objects
Chang Liu
Xuefeng Wang
Article 05 March 2007 Article: 809
3D Structure Fabrication by FIB Milling and Deposition
Toshiaki Fujii
Koji Iwasaki
Takashi Kaito
Article 24 January 2007 Article: 808
Micro-Fracture Testing of Ni-W Microbeams Produced by Electrodeposition and FIB Machining
David Armstrong
Abdul Haseeb
Steve Roberts
Article 03 January 2007 Article: 807
Effective Use of Focused Ion Beam (FIB) in Investigating Fundamental Mechanical Properties of Metals at the Sub-Micron Scale
Julia R. Greer
Article 24 January 2007 Article: 803
Indentation-Induced Damage Mechanisms in Germanium
David J. Oliver
Jodie E. Bradby
Paul Munroe
Article 03 January 2007 Article: 802
Probe Tip Replacement System Inside the FIB
Gonzalo Amador
Lyudmila Zaykova-Feldman
Thomas M. Moore
Article 03 January 2007 Article: 507
Fabrication of Sub-250nm High Aspect Ratio Apertures by Focused Ion Beam Lithography
Todd Simpson
Ian V. Mitchell
Article 05 March 2007 Article: 506
Direct Focused Ion Beam Drilling of Nanopores
Nick Patterson
V. Carter Hodges
C. Jeff Brinker
Article 03 January 2007 Article: 505
Reactive Deposition of Dielectrics by Ion Beam Assisted E-beam Evaporation
J. R. Nightingale
T. Cornell
D. Korakakis
Article 24 January 2007 Article: 501
Focused Ion Beam Study of Ni5Al Single Splat Microstructure
Yuhong Wu
Meng Qu
Andrew Gouldstone
Article 05 March 2007 Article: 404
Investigation of Cell-Sensor Hybrid Structures by Focused Ion Beam (FIB) Technology
Andreas Heilmann
Frank Altmann
Mirko Lehmann
Article 05 March 2007 Article: 303
Focused Ion Beam Techniques for Butterfly Wing Scales Analysis and 3-D Reconstruction
Katharine Dovidenko
Laurie A. Le Tarte
Radislav A. Potyrailo
Article 05 March 2007 Article: 302
Chemically Enhanced Focused Ion Beam Selective Patterning of Titanium, Titanium Oxide and Nitride Thin Films
John Melngailis
Andrei Stanishevsky
Article 05 March 2007 Article: 205
Ordered Arrays of Colloidal Gold Nanoparticles Fabricated by Focused Ion Beam Techniques
Todd W. Simpson
Ian V. Mitchell
Article 03 January 2007 Article: 105
Ion Beam Lithography And Resist Processing for Nanofabrication
Khalil Arshak
Stephen F. Gilmartin
Miroslav Mihov
Article 03 January 2007 Article: 102

Volume 983, Issue 1

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