Volume 782, Issue 1

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December 2003

Symposium A — Micro- and Nanosystems

Issue Editors:

D. La Van,
M. Mc Nie,
A. Ayon,
M. Madou,
S. Prasad

69 articles in this issue

Resist Poisoning-Free Advanced PECVD-Based Anti-Reflective Coating (ARC) for 90nm Technology and Beyond
Sang H. Ahn
Sudha Rathi
Hichem M’Saad
Articles 01 February 2011 Article: 591
Study of the Pull-In Voltage for MEMS Parallel Plate Capacitor Actuators
Emmanuel Saucedo-Flores
Rubén Ruelas
Jung-chih Chiao
Articles 01 February 2011 Article: 586
Formation of a Ba-Te Surface on GaAs
Kevin A. Boulais
Francisco Santiago
Victor H. Gehman
Articles 01 February 2011 Article: 584
Mechanical Characterizations of Laser Microwelds for MEMS Packaging
Wei Han
Ryszard J. Pryputniewicz
Articles 01 February 2011 Article: 582
Advanced Anodic Bonding Processes For MEMS Applications
V. Dragoi
P. Lindner
S. Farrens
Articles 01 February 2011 Article: 580
Study of high aspect ratio etching in silicon by a mixture of SF₆/O₂ using a 2-D model based on a Monte Carlo approach.
G. Marcos
A. Rhallabi
P. Ranson
Articles 01 February 2011 Article: 578
Application of FIB/SEM and TEM to Bit Failure Analyses in SRAM Arrays
Wentao Qin
Alex Volinsky
David Theodore
Articles 01 February 2011 Article: 577
Evolution of Mesas on Si(111) Surface Under Sublimation: Nanofabrication through the Control of Atomic Steps
Kee-Chul Chang
Jack M. Blakely
Articles 01 February 2011 Article: 575
Measurement of shape and deformation of MEMS at the wafer level
Cosme Furlong
Curtis F. Ferguson
Ryszard J. Pryputniewicz
Articles 01 February 2011 Article: 572
Electrical Characterization of BCB for Electrostatic Microelectromechanical Devices
Alireza Modafe
Nima Ghalichechian
Reza Ghodssi
Articles 01 February 2011 Article: 569
Field Emission from the Carbon Nanotubes Grown over Cylindrical Surface
D. Sarangi
A. Karimi
Articles 01 February 2011 Article: 566
Pattern Formation in Directional Solidification
Mike Greenwood
Mikko Haataja
Nikolas Provatas
Articles 01 February 2011 Article: 565
Interface Adhesion and Reliability of Microsystem Packaging
Marvin I. Francis
Kellen Wadach
Junghyun Cho
Articles 01 February 2011 Article: 564
2D InP etching simulation under high density plasma of chlorine
A. Rhallabi
B. Liu
J. P. Landesman
Articles 01 February 2011 Article: 562
Novel Electro-Optic Ceramic Materials for Microchip and High Power Lasers
Xuesheng Chen
Kewen Li
B. Di Bartolo
Articles 01 February 2011 Article: 557
A Novel AFM Chip for Fountain Pen Nanolithography - Design and Microfabrication
Keun-Ho Kim
Nicolaie Moldovan
Horacio D. Espinosa
Articles 01 February 2011 Article: 556
Adhesion force and Nanotribological Characteristics of Chemical Vapor Deposited Fluorocarbon Films
Nam-Kyun Kim
Tae-Gon Kim
Hyung- Jae Shin
Articles 01 February 2011 Article: 555
Evaluation of Design and Performance of a Cryogenic Mems Micropump Realized with Si-Based Diaphragm Using Combination of Zygo/Wyko Interferometer and Raman Spectroscopy
Yi Zhao
Daryl Ludlow
Xin Zhang
Articles 01 February 2011 Article: 552
Effect of Polymer Substrates on Nano Scale Hot Embossing
Jin-Hyung Lee
Hyun-Woo Lim
Yangsun Kim
Articles 01 February 2011 Article: 550
Layer-by-Layer Engineered Microreactors for Bio-Polymerization of 4-(2-aminoethyl) phenol hydrochloride
R. Ghan
T. Shutava
Y. Lvov
Articles 01 February 2011 Article: 543
Cavitation Erosion and Friction Behavior of Stainless Steel as a Function of Grain Size
Giuseppe Bregliozzi
Syed Imad-Uddin Ahmed
Henry Haefke
Articles 01 February 2011 Article: 538
Dissipation Mechanisms in Thin-Film Silicon Microresonators on Glass Substrates
J. Gaspar
V. Chu
J. P. Conde
Articles 01 February 2011 Article: 537
Structural and Morphological Study of Zirconia and Titania Sol-Gel Monolayered Films Supported on Soda-Lime Glass Substrates
Luisa F. Cueto
Enrique Sánchez
Gustavo A. Hirata
Articles 01 February 2011 Article: 536
Electromechanical Behavior in Micromachined Piezoelectric Membranes
M. C. Robinson
J. C. Raupp
D. F. Bahr
Articles 01 February 2011 Article: 533
Localized, In-Situ Vacuum Measurements For MEMS Packaging
Nicholas Moelders
James T. Daly
Mark P. McNeal
Articles 01 February 2011 Article: 532
Ceramic Microfabrication Techniques for Microdevices with Three-Dimensional Architecture
Balakrishnan Nair
Merrill Wilson
Marc Flinders
Articles 01 February 2011 Article: 530
Polyurethane Nanofiber Webs for Sensor and Actuator Applications in Microelectromechanical Systems (MEMS)
Mustafa M. Demir
Mansoor Naseer
Yusuf Z. Menceloglu
Articles 01 February 2011 Article: 529
Characterization of Mechanical Properties of Silicon Nitride Thin Films for Space Applications
Wen-Hsien Chuang
Thomas Luger
Reza Ghodssi
Articles 01 February 2011 Article: 521
Effects of Softbake Parameters on a Benzocyclobutene (BCB) Adhesive Wafer Bond
Daniel N. Pascual
Articles 01 February 2011 Article: 520
3D Small Angle X-Ray Scattering (SAXS) on deformed PVDF Foils
Guenther Maier
Gernot Wallner
Peter Fratzl
Articles 01 February 2011 Article: 517
Micromechanical Characterization of Gasb by Microbeam Deflecion and Using Nanoprobe and Finite Element Analysis
M. Ospina
S. R. Vangala
W. D. Goodhue
Articles 01 February 2011 Article: 514
Microwave Molecular Sieves Synthesis and Capillary Crystal Growth by Geometric Confinement.
Steven B. Ogunwumi
John F. Wight
James C. Fajardo
Articles 01 February 2011 Article: 513
Fabrication of Micro-Contact Probe Using Mo-Cr Spring with Au Plating Bump
Chinami Kaneshiro
Kohji Hohkawa
Articles 01 February 2011 Article: 512
Controlling the position and morphology of nanotubes within a polymer thin film
Emer Lahiff
Andrew I. Minett
Pulickel M. Ajayan
Articles 01 February 2011 Article: 511
Ellipsometry Measurement Accuracy of Gate Oxides under Polysilicon
Gary Jiang
Don Pelcher
George Collins
Articles 01 February 2011 Article: 510
Semiconductor surface – molecule interactions: a case study in the wet etching of InP by α-hydroxy acids
Prabhakar Bandaru
Articles 01 February 2011 Article: 135
Measurement of Work of Adhesion on Wafers for Direct Bonding
Kevin T. Turner
S. Mark Spearing
Articles 01 February 2011 Article: 124
Direct Writing of 3D Microstructures Using a Scanning Laser System
Hui Yu
Alexander Grüntzig
Xin Zhang
Articles 01 February 2011 Article: 115
Evaluating the Mechanical Properties of MEMS by Combining the Resonance Frequency and Microtensile Methods
Dongil Son
Jong-jin Kim
Dongil Kwon
Articles 01 February 2011 Article: 106
Non-impact electrostatic micromanipulation by voltage sequence for time
Shigeki Saito
Kunio Takahashi
Masataka Urago
Articles 01 February 2011 Article: 105
Characterization and Modeling of Wafer and Die Level Uniformity in Deep Reactive Ion Etching (DRIE)
Hongwei Sun
Tyrone Hill
Duane Boning
Articles 01 February 2011 Article: 102
Gas Adsorption Evidence of Single-Wall and Multi-Wall Carbon Nanotube Opening
Moulay-Rachid Babaa
Edward McRae
Jaafar Ghanbaja
Articles 01 February 2011 Article: 95
Ferroelectric Lead Zirconate Titanate and Barium Titanate Nanoshell Tubes
Yun Luo
Izabela Szafraniak
Marin Alexe
Articles 01 February 2011 Article: 94
Microfrictional Properties of Titanium Carbide
Syed Imad-Uddin Ahmed
Giuseppe Bregliozzi
Henry Haefke
Articles 01 February 2011 Article: 86
Control of Stress in a Metal–Nitride–Metal Sandwich for CMOS-Compatible Surface Micromachining
Rhodri R. Davies
David J. Combes
Kevin M Brunson
Articles 01 February 2011 Article: 85
Potentiometric Detection of DNA Molecules Hybridization Using Gene Field Effect Transistor and Intercalator
Toshiya Sakata
Hidenori Otsuka
Yuji Miyahara
Articles 01 February 2011 Article: 76
Electrical Porous Silicon Microarray for dna Hybridization Detection
Marie Archer
Marc Christophersen
Karl D. Hirschman
Articles 01 February 2011 Article: 72
Mechanical Properties of Metallic Thin Films: Tensile Tests vs. Indentation Tests
Nian Zhang
Changjin Xie
Wei Tong
Articles 01 February 2011 Article: 63
Thermophysical Properties of Ni Films for LIGA Microsystems
Diana-Andra Borca-Tasciuc
Rajesh Nimbalkar
Theodorian Borca-Tasciuc
Articles 01 February 2011 Article: 62
Single Osteoblast Chemical Sensor via Non-invasive Bio-Electronic Interface
Mo Yang
Xuan Zhang
Cengiz S Ozkan
Articles 01 February 2011 Article: 59

Volume 782, Issue 1

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